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Probe unit of microscope with atomic force and manufacturing method

A technology of atomic force microscope and manufacturing method, which is applied in the direction of measuring device, scanning probe technology, scanning probe microscopy, etc., can solve the problem of low orientation of carbon nanotubes, achieve uniform hole diameter, easy control of depth, and improve The effect of precision

Inactive Publication Date: 2007-04-11
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In order to solve the problem of low orientation of carbon nanotubes used as AFM probe tips in the prior art, the first object of the present invention is to provide a kind of AFM probe device with highly oriented carbon nanotube tips

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  • Probe unit of microscope with atomic force and manufacturing method
  • Probe unit of microscope with atomic force and manufacturing method
  • Probe unit of microscope with atomic force and manufacturing method

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Embodiment Construction

[0018] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0019] Please refer to Fig. 1, the AFM probe device 5 provided by the present invention includes: a probe base 50; a cantilever 52 fixed on the probe base 50 has an end 54; of carbon nanotubes 60 . Wherein, the top 56 of the cantilever end 54 forms a plane 57 , and the plane 57 has a hole 58 . Carbon nanotubes 60 grow out of the hole 58 and are substantially perpendicular to the plane 57 .

[0020] In this embodiment, the diameter of the hole 58 is preferably 20-100 nanometers. Cantilever 52 may be made of silicon nitride.

[0021] Please refer to FIG. 2, the manufacturing method 7 of the above-mentioned AFM probe device 5 provided by the present invention includes steps:

[0022] (2a) providing an AFM-usable cantilever 52' ​​having a tipped end 54' having a pointed top 56';

[0023] (2b) A plane 57' can be formed on the top 56' of the end by cutting and...

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Abstract

The present invention relates to an atomic force microscope probe device and its making method. It includes a probe seat, a cantilever which is fixed on the probe seat and has at least a tail end on which a probe point can be set and a carbon nano tube which is set on the tail end of said cantilever and used as probe point, in which the top portion of said probe cantilever tail end is formed into a plane with hole, and said carbon nano tube can be grown out from said hole which is basically perpendicular to said plane.

Description

【Technical field】 [0001] The invention relates to an atomic force microscope (Atomic Force Microscopy, hereinafter referred to as AFM) probe device and a manufacturing method thereof, in particular to an atomic force microscope probe device using carbon nanotubes as needle tips and a manufacturing method thereof. 【Background technique】 [0002] In recent years, with the increase in density and integration of devices such as optical disks, magnetic recording, and semiconductors, the application range of AFM, which measures the surface morphology of samples with sub-nanometer precision, has been expanding. It works by exploiting the force-distance dependence between its probe and sample to obtain material surface structures and properties. A typical AFM has three imaging modes: contact, non-contact, and tapping. The probe is the core component of AFM, which is expensive and easily damaged. [0003] Taking advantage of the good elasticity and tip properties of carbon nanotube...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N13/16G01Q60/38
Inventor 宋长志
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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