Probe unit of microscope with atomic force and manufacturing method

A technology of atomic force microscope and manufacturing method, which is applied in the direction of measuring device, scanning probe technology, scanning probe microscopy, etc., can solve the problem of low orientation of carbon nanotubes, achieve uniform hole diameter, easy control of depth, and improve The effect of precision
CN1310024CInactive Publication Date: 2007-04-11HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
Publication Date
2007-04-11
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention relates to an atomic force microscope probe device and its making method. It includes a probe seat, a cantilever which is fixed on the probe seat and has at least a tail end on which a probe point can be set and a carbon nano tube which is set on the tail end of said cantilever and used as probe point, in which the top portion of said probe cantilever tail end is formed into a plane with hole, and said carbon nano tube can be grown out from said hole which is basically perpendicular to said plane.
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Description

【Technical field】

[0001] The invention relates to an atomic force microscope (Atomic Force Microscopy, hereinafter referred to as AFM) probe device and a manufacturing method thereof, in particular to an atomic force microscope probe device using carbon nanotubes as needle tips and a manufacturing method thereof. 【Background technique】

[0002] In recent years, with the increase in density and integration of devices such as optical disks, magnetic recording, and semiconductors, the application range of AFM, which measures the surface morphology of samples with sub-nanometer precision, has been expanding. It works by exploiting the force-distance dependence between its probe and sample to obtain material surface structures and properties. A typical AFM has three imaging modes: contact, non-contact, and tapping. The probe is the core component of AFM, which is expensive and easily damaged.

[0003] Taking advantage of the good elasticity and tip properties of carbon nanotube...

Claims

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