Encapsulated pin structure for improved reliability of wafer
A technology of stitching and patterning, which is used in the assembly of printed circuits with electrical components, the formation of electrical connection of printed components, and the manufacture of printed circuits, which can solve problems such as complex structures.
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[0025] Figure 1 shows the top region of an integrated circuit with unpatterned layers. At the bottom, box 200 represents an electronic structure such as an integrated circuit to be attached by contacts to be formed. Layer 30 is a dielectric layer such as polyimide that seals the structure to insulate the interconnects and block the penetration of moisture and other undesirable chemicals.
[0026] Box 35 schematically represents vias extending up through the polyimide from interconnects not shown. Contacts on top of the structure will make contact with these vias.
[0027] Layer 20 is a barrier and / or adhesion metallurgy layer. For example, use TiW, Ti, TaN and other materials known to those skilled in the art to block the penetration of contact materials, such as copper, and / or to improve the contact material and interconnect material (usually aluminum alloy) of adhesion.
[0028] Layer 10 is a seed layer that facilitates the deposition and plating of the material for the ...
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