Manufacture process of single ink jet head

Abstract

The present invention discloses a method of manufacturing a monolithic ink-jet printhead which includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent. An ink-jet printhead whose elements are monolithically formed by a simplified process using a single negative photoresist can be manufactured.

Description

technical field [0001] The present invention relates to a method of making an inkjet printhead, and more particularly, the present invention relates to a method of making a monolithic inkjet printhead using a negative photoresist. Background technique [0002] In general, an inkjet print head is a device that prints out an image in a set color by ejecting fine printing ink droplets to a desired position on a recording medium. In such an inkjet printhead, ink is delivered from an ink reservoir to an ink chamber through an ink supply hole and a flow restrictor. The ink filled in the ink chamber is heated by a heating element installed in the ink chamber, and is ejected from several nozzles in the form of droplets under the pressure of the bubbles generated by the heating element. [0003] Generally, since an inkjet printhead is to achieve high definition and high printing speed, it is necessary to arrange a plurality of nozzles in a highly integrated manner in its structure. ...

AI Technical Summary

Problems solved by technology

Secondly, since the thermal expansion coefficients of the nozzle plate 15 and the print head chip substrate 21 are different when the nozzle plate 15 is thermally bonded to the print head chip substrate 21, a mismatch will occur between the nozzle 15a and the heating element. positive situation

Third, the process of manufacturing inkjet printheads is very complex due to the need to perform an electroforming process, a two-step photoetching process, and a bonding process

However, this method has a limitation: it can only be used to manufacture inkjet printheads that work in side-firing

In addition, since this method requires a cutting process, the powder and particles generated during the cutting process may clog the nozzles and ink channels, and the shape of the photocurable polymer used to form the ink channels may also change during the cutting process. out of shape

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