Method of forming niobium doped tin oxide coatings on glass and coated glass formed thereby
A coating and coating technology, applied in the direction of coating, etc.
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[0036] The first set of samples was produced conventionally and only doped with niobium. In this sample, dimethyltin dichloride was used as the tin source, while water and oxygen were also added. NbCl 5 Pass through a bubbler and suspend in helium carrier gas. Additional inert gas (He) was added in order to obtain the desired total flow rate. The surface resistance of the resulting coating was measured with a four-point probe. The thickness of the resulting coating was determined by color analysis. In addition, surface finish measurement techniques may also have been used to determine coating thickness.
[0037] Sample 1 included a DMT flow rate of 0.6 standard liters per minute. Take 10.3 standard cm 3 Add water at a rate of 1 / min. Oxygen was added at a rate of 18 Nl / min. Sample 1 is the baseline test sample without niobium pentachloride. The surface resistance of sample 1 is about 350-500 ohms / square, and the calculated thickness is about 3800 angstroms. The surfac...
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