Magnetic suspension type micro motion system

A micro-motion and magnetic levitation technology, applied in the field of magnetic variable systems, can solve problems such as small motion range, low motion accuracy, and difficulty in realizing high-precision nano-scale motion, achieving the effect of frictionless and guaranteed motion accuracy

Inactive Publication Date: 2003-06-25
ZHEJIANG SCI-TECH UNIV
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Problems solved by technology

Although piezoelectric ceramics and flexible hinge mechanisms have nanometer or even sub-nanometer precision, their range of motion is very small, generally limited to the range of microns
Due to the influence of processing technology, the crawling mechanism generally has low motion accuracy
Due to the inevitable influence of gas turbulence on the air-flotation micro-motion worktable, it is difficult to achieve high-precision nanoscale movement below 5nm

Method used

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  • Magnetic suspension type micro motion system
  • Magnetic suspension type micro motion system
  • Magnetic suspension type micro motion system

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Embodiment Construction

[0013] like figure 1 As shown, it includes a laser nanometer micro-displacement and micro-angle measuring instrument 1, two measuring mirrors 2, 4, a motion platform 3, a laser heterodyne nano-interferometer 5, four permanent magnet arrays 8, 19, 6, 14, four A group of stator windings 9, 18, 7, 13, three capacitive sensors 10, 11, 12, a digital-to-analog converter 15, a computer 16, and an analog-to-digital converter 17; the first permanent magnet array is respectively embedded in the bottom of the four sides of the motion platform 3 8. The second permanent magnet array 19, the third permanent magnet array 6, the fourth permanent magnet array 14, the first and second permanent magnet arrays 8, 19 correspond, the third and fourth permanent magnet arrays 6, 14 correspond, in The first and second stator windings 9 and 18 are installed respectively below the first and second permanent magnet arrays 8 and 19, and the third and fourth stator windings 7 and 13 are respectively instal...

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Abstract

This invention discloses a magnetic suspension micromovement system including a laser nano microshift and microangle measuring instruments, two measuring mirros, movement platform, laser heterodyne nano interferometer, four permanent magnets array, four sets stator winding, three capacitance transducers, DAC, a computer, ADC, under the precise measurement and control of capacitance transducer, laser nano microshift and microangle measuring instrument, laser heterodyne nano interferometer, the movement platform is suspended by interaction of electromagnetic force generated between permanent magnet array and related stator winding inserted into the platform bottom surface and generates siz free degrees nano grade movement.

Description

technical field [0001] The invention relates to a magnetic variable system, which is a magnetic levitation micro-motion system. Background technique [0002] Typical classifications of scanning micro-motion tables involved in the fields of micro-opto-electromechanical technology and nanotechnology include piezoelectric ceramics, crawling mechanisms, flexible hinge mechanisms, and air-floating micro-motion tables. Although piezoelectric ceramics and flexible hinge mechanisms have nanometer or even sub-nanometer precision, their range of motion is very small, generally limited to the range of microns. Due to the influence of processing technology, the crawling mechanism generally has low motion accuracy. Due to the inevitable influence of gas disturbance, the air-flotation micro-motion worktable is difficult to achieve high-precision nanoscale movement below 5nm. Contents of the invention [0003] The purpose of the prese...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N15/00
Inventor 陈本永周砚江吴晓维
Owner ZHEJIANG SCI-TECH UNIV
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