Method for preparing high-temperature superconducting material intrinsic junction

A superconducting material, high temperature technology, applied in the use of superconducting elements, the manufacture/processing of superconducting devices, and devices containing a junction of different materials, etc., can solve the problem of low repeatability, etc., to achieve the effect of precise control

Inactive Publication Date: 2004-01-28
NANJING UNIV
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  • Abstract
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Problems solved by technology

There are also some reports on the preparation of intrinsic junctions containing a few knots, but the reproducibility is not high, and the bes

Method used

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  • Method for preparing high-temperature superconducting material intrinsic junction
  • Method for preparing high-temperature superconducting material intrinsic junction
  • Method for preparing high-temperature superconducting material intrinsic junction

Examples

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[0021] 1. Use Bi 2 Sr 2 CaCu 2 O 8+x (BSCCO) as a high-temperature superconducting material, the thickness of a single intrinsic junction is 1.54 nm, the metal layer material is silver, and the insulating layer material is calcium fluoride.

[0022] Ion energy

[0023] ER Bi , ER Ag And ER Au Represents the etching rate of BSCCO, silver and gold respectively

[0024] The present invention designs and constructs an intrinsic knot with three knots. In the experiment, the thickness of the first layer of silver film is 56 nanometers, the first ion etching time is 12 minutes, and the number of junctions in the mesa structure obtained is 7, which is one more than the expected result. In order to obtain an intrinsic junction containing three junctions, ion etching is required to make 4 junctions in the mesa structure separated by ion etching, so as to be included in the contact resistance. For this reason, first relax the requirements on the number of junctions, and design th...

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Abstract

The invented method includes following steps. (1) Manual peeling, (2) metal layer protection, (3) fixation, (4) photo etching graphics, (5) ion etching, (6) insulation protection, (7) ultrasound cleaning, (8) structuring and connecting electrode. In step (5), ion etching with low energy is adopted. In step (8), two top electrodes are structured on mesa structure. The advantages of the invention are as follows. Through fine controlling parameters such as thickness of metal level and etching time etc. the invention realizes primary controlling number of intrinsic junction. The fine controlling number of junction is realized by second time of ion etching and added etching. The invention is suitable to control of number of intrinsic junction for a variety of high temperature super conducting material.

Description

1. Technical field [0001] The invention relates to a high-temperature superconducting material, in particular to a method for preparing the intrinsic junction of the high-temperature superconducting material. 2. Background technology [0002] Since the discovery of high-temperature superconducting materials, they have been extensively studied and paid attention to in the field of materials and devices. High-temperature superconducting materials have strong anisotropy, and have a natural layered structure of Josephson coupling along the c-axis direction. Using this layered structure, an intrinsic Josephson junction can be formed, called an intrinsic junction for short. Intrinsic junction is a very important topic in the research of high temperature superconducting junction, it has many potential application values ​​such as high frequency, high power oscillation source, high frequency signal detection and voltage reference. Thanks Bi 2 Sr 2 CaCu 2 o 8+x (BSCCO) single cr...

Claims

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Application Information

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IPC IPC(8): C04B35/00H01B12/00H01L39/22H01L39/24
CPCY02E40/64Y02E40/60
Inventor 尤立星吴培亨许伟伟康琳
Owner NANJING UNIV
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