Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Column shaped structure nano-silicon/non crystal silicon carbon composite photoconductive layer liquid crystal light valve and its preparation method

A technology of amorphous silicon carbon and columnar structure, applied in nonlinear optics, optics, instruments, etc., can solve the problems of slow response speed of light valves, low resolution, and serious lateral dispersion of carriers

Inactive Publication Date: 2004-05-05
ZHEJIANG UNIV
View PDF0 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the current liquid crystal light valve, the light guide layer is generally made of CdS, CdSe, a-Si:H, C-Si or GaAs, BSO and other materials. Although the photoconductive layer has a high response speed, the mobility of single crystal silicon is relatively large, the lateral dispersion of carriers is serious, and the resolution is low.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Column shaped structure nano-silicon/non crystal silicon carbon composite photoconductive layer liquid crystal light valve and its preparation method
  • Column shaped structure nano-silicon/non crystal silicon carbon composite photoconductive layer liquid crystal light valve and its preparation method
  • Column shaped structure nano-silicon/non crystal silicon carbon composite photoconductive layer liquid crystal light valve and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

preparation example

[0040] In the modified PECVD equipment, a layer of metal Al induction layer is deposited on the substrate coated with ITO film by vacuum thermal evaporation, the thickness is 20-350nm, the substrate temperature is 320°C, and the deposition vacuum is 7-9× 10 -3 Torr; then deposit a-SiC:H film on the Al layer by PECVD in the same reaction chamber, the deposition vacuum is 0.5-1Torr, the substrate temperature is 320°C, SiH 4 with H 2 The volume ratio is 4:1, SiH 4 with H 2 The flow rate of the mixed gas is about 400sccm, the radio frequency current is 100mA, and the frequency is 13.56MHz; 2 The annealing treatment is carried out for 1-6 hours under atmosphere, and the annealing temperature is 250-500°C. A columnar nc-Si / a-SiC:H photoconductive layer 3 with a light-to-dark conductivity ratio of 103 and a longitudinal conductivity 2 to 4 times that of the transverse conductivity is obtained.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
Login to View More

Abstract

A liquid crystal light valve with composite optical conducting nano Si / non-crystal SiC layer having cylindrical structure is sequentially composed of the first optical glass, the first transparent electric conductive film, optical conducting layer, light barrier layer, medium reflecting layer, the first and the second LC orientating layer, the second transparent electric conductive film and the second optical glass. It features that an anisotropic composite optical conducting nano Si / non-crystal SiC layer having cylindrical structure is plated on said first transparent electric conductive film. Its advantages are less transverse diffusion of current carriers, and high resolution of LC light valve.

Description

Technical field [0001] The invention relates to an optical addressing spatial light modulator, in particular to a columnar structure nano-silicon / amorphous silicon-carbon composite light guide layer liquid crystal light valve and a preparation method. Background technique [0002] Liquid crystal light valve is a light-light image sensor developed in the 1970s. From the perspective of the working principle of the light valve, it can be used to convert between different wavelengths of light, and between coherent light and incoherent light. , so it can be used for real-time large-screen projection display, real-time optical correlation, optical data processing, real-time optical edge enhancement, real-time optical image subtraction, etc. In the current liquid crystal light valve, the light guide layer is generally made of CdS, CdSe, a-Si:H, C-Si or GaAs, BSO and other materials. CdS as the light guide material has a slow response speed, and single crystal silicon Although the ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/13G02F1/1333G02F1/135
CPCG02F2001/1355G02F1/1354G02F1/1355
Inventor 杜丕一于永红韩高荣翁文剑
Owner ZHEJIANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com