Mosaic array of ultrasound transducer by micromachining
An ultrasonic transducer and mosaic technology, applied in piezoelectric/electrostrictive transducers, fluids using vibration, ultrasonic/sonic/infrasonic diagnosis, etc., can solve the problem of expensive, complex dynamic focusing beams, and difficult to achieve portability And other issues
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[0029] The present invention discloses a unique method of implementing a mosaic array using micromachined ultrasonic transducers (MUTs). For purposes of illustration, the present invention will be described using capacitive micromachined ultrasonic transducers (cMUTs). ), however, it needs to be understood that this disclosed aspect of the invention is not limited to the use of cMUTs, but can use pMUTs, or even diced piezoelectric ceramic arrays, where each diced subunit passes through an interconnect Connect to the switch layer below.
[0030] cMUTs are silicon-based devices that include small (eg, 50um) capacitive tympanic membrane patches or cells capable of transmitting and receiving ultrasonic energy, see figure 1 , figure 1A cross-section of a typical MUT transducer unit 2 is shown. An array of such MUT transducer elements is typically fabricated on a substrate 4, such as a silicon wafer. For each such MUT transducer unit, a thin film or diaphragm 8, which may be made...
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