Grid structure from material with high dielectric constant and preparing technique

A technology of high dielectric constant material and preparation process, applied in circuits, electrical components, semiconductor/solid-state device manufacturing, etc., can solve the problems of loss of switching characteristics and large gate leakage current of CMOS transistors, and achieve good interface characteristics and reliability. sexual effect

Inactive Publication Date: 2004-10-27
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT +1
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Problems solved by technology

[0002] With the rapid development of integrated circuit technology, the device size becomes smaller and smaller, especially when the CMOS process technology enters below 65 nanometer technology, the conventional silicon oxide gate has become thinner than its reliable physical limit thickness, thus oxidation Transistors fabricated with silicon gates will have very large gate leakage currents and cause CMOS transistors to lose their switching characteristics

Method used

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  • Grid structure from material with high dielectric constant and preparing technique

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Effect test

Embodiment 1

[0014] 1. Use the rapid annealing furnace RTO (or conventional oxidation furnace), the furnace temperature is 900 ° C, in NO (or N 2 O) in the gas, on the surface of a clean silicon wafer, oxidize and grow a silicon oxynitride (SiON) film of about 10 Å;

[0015] 2. Deposit 30 Å of high dielectric constant (high-k) material, such as HfO, on the SiON layer by CVD (MOCVD, ALCVD, etc.) 2 or HfSi x o y or HfAl x o y Wait.

[0016] 3. Deposit a layer of ultra-thin silicon nitride (SiN) on the high dielectric constant material layer by CVD (MOCVD, ALCVD, etc.), with a thickness of about 10 Å.

Embodiment 2

[0018] 1. Use the rapid annealing furnace RTO, the furnace temperature is about 1000°C, and grow a 5 Å SiON film on the surface of the clean silicon wafer in NO gas;

[0019] 2. Deposit 5 Å of high dielectric constant material, such as Al, on the SiON layer by CVD (MOCVD or ALCVD) method 2 o 3 or ZrO 2 or Ta 2 o 5 Wait.

[0020] 3. Using CVD (MOCVD or ALCVD) to deposit an ultra-thin SiN layer on the high dielectric constant material layer with a thickness of 15 Å.

Embodiment 3

[0022] 1. Use a conventional oxidation furnace, the furnace temperature is about 800 ° C, in N 2 In O gas, oxidize and grow a 15 Å SiON film on the surface of a clean silicon wafer;

[0023] 2. Deposit 60 Å of high dielectric constant material, such as HfO, on the SiON layer by CVD method 2 or Al 2 o 3 Wait.

[0024] 3. Treat the surface of the prepared high dielectric constant material layer with nitrogen plasma to form a thin layer of silicon nitride (SiN) on the surface with a thickness of 3 Å.

[0025] The sandwich gate structure prepared in the above examples, the SiON layer can effectively isolate the diffusion between the impurity elements in the high dielectric constant material and the silicon substrate, and has very good interface characteristics and reliability; the SiN layer can Play the role of high dielectric constant material and polysilicon interface layer, and can block from P + Polycrystalline boron penetration.

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Abstract

Oxidizing surface of silicon chip grows a very thin silicon oxynitride layer as a buffer of interface between material with high dielectric constant and silicon substrate in order to insulate diffusion between impurity element in material with high dielectric constant and silicon substrate. Carrying out nitrogen treatment for surface of material with high dielectric constant or depositing a thin layer of silicon nitride covers material with high dielectric constant. The nitrogen treated surface or deposited thin layer as interface layer between material with high dielectric constant and polysilicon blocks off penetration from boron P+ polycrystal. In the invention , grid structure is in sandwich type. The invention is applicable to not more than 65 Nano CMOS technique.

Description

technical field [0001] The invention belongs to the technical field of integrated circuit manufacturing technology, and in particular relates to a high dielectric constant material gate structure and a preparation technology thereof. Background technique [0002] With the rapid development of integrated circuit technology, the device size becomes smaller and smaller, especially when the CMOS process technology enters below 65 nanometer technology, the conventional silicon oxide gate has become thinner than its reliable physical limit thickness, thus oxidation Transistors fabricated with silicon gates will have very large gate leakage currents and cause CMOS transistors to lose their switching characteristics. Therefore, in order to continue to utilize the well-developed large-scale CMOS production process technology, people must use a high-dielectric constant (high-k) material to replace the traditional silicon oxide gate, increasing the gate thickness (but equivalent A sil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/285H01L21/336H01L21/8238H01L27/092H01L29/78
Inventor 陈寿面
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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