Multifunctional optical quality detector

Abstract

The testing device includes standard collimator, scan type Hartmann diaphragm, focusing mirror, and CCD camera. The Hartmann diaphragm is installed on diaphragm bracket. Encoder is fixed on upper part of the bracket, and step motor and computer are installed on lower part of the bracket. Under control of computer, step motor drives scan type Hartmann diaphragm to rotate around optical axis, and computer receives image output from CCD camera and position information of scan type Hartmann diaphragm from encoder, and carries out data process for image. The invention can be applied for guiding fabricating optical elements, adjustment of optical path, evaluating qualities of incident beam and focal spot, possessing advantages of high testing precision, quick speed, and multiple functions.

Description

Technical field: [0001] The invention relates to an optical element, in particular to a multifunctional optical quality detection device. Background technique: [0002] In the prior art, the structure of the traditional Hartmann inspection device is as follows: figure 1 As shown, the light emitted by the light source 1 illuminates the aperture diaphragm 3 through the condenser lens 2, thereby obtaining a point light source; 4 After being collimated into a parallel beam, it is irradiated on the Hartmann diaphragm 5, and the parallel beam is divided into many pairs of thin beams with different heights, and then directed to the tested component 6. The distance between the center of the thin beam and the optical axis is measured at positions 7 and 8 by means of photography, and the aberration information is obtained through analysis. The structure of the Hartmann aperture 5 is as follows figure 2 As shown, the small hole pairs on the Hartmann diaphragm 5 are distributed symm...

AI Technical Summary

Problems solved by technology

[0005] 2. Unable to measure local error of components

The measured error is only the surface error of different annular zones of the tested component, and the error information of each local small area of ​​the component is difficult to obtain

[0006] 3. Sampling density is limited

The distance between the small holes on the diaphragm is fixed, and the sampling can only be done at a certain density, so that the error information of the ring zone area corresponding to the space between the small holes on the diaphragm cannot be detected, resulting in low measurement accuracy

[0007] 4. Long measurement time

The traditional method usually adopts the photographic method. In the measurement process, a series of steps such as film exposure, development, and spot position measurement are required, which takes a long time. At the same time, random factors such as vibration may be introduced during the process, which will cause great Measurement error

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