Single chip double inertia parameter accelerometer gyroscope

A technology of inertial parameters and accelerometers, applied in gyroscope/steering sensing equipment, speed/acceleration/shock measurement, acceleration measurement using gyroscope, etc. Problems such as heavy weight, to achieve the effect of large driving amplitude, high practical value, and improved sensitivity

Inactive Publication Date: 2005-08-03
ZHONGBEI UNIV
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  • Abstract
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Problems solved by technology

[0010] The present invention solves the above-mentioned problems existing in the existing accelerometer gyroscope, that is, due to the inclusion of two accelerometers, the precision of the manufacturing process is high, the follow-up processing procedure of information is complex and cumbersome, the structure is relatively complicated, and the volume and weight are relatively large And it is only applicable to problems such as the state where the acceleration and angular velocity directions are perpendicular to each other. A single-chip dual-inertia parameter accelerometer gyroscope is provided, and it is only for the purpose of providing the perception hardware structure of the accelerometer gyroscope, and does not involve (known) Subsequent processing of output information and corresponding processing circuits

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  • Single chip double inertia parameter accelerometer gyroscope
  • Single chip double inertia parameter accelerometer gyroscope
  • Single chip double inertia parameter accelerometer gyroscope

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Embodiment Construction

[0018] The single-chip dual-inertia parameter accelerometer gyroscope includes a housing 1, a mass block is anchored on the bottom plate of the shell through an elastic beam 2, sensitive comb teeth 3 are fixed on both sides of the mass block, and fixed comb teeth 4 are fixed on the bottom plate of the housing , the mass block is composed of an outer frame 5 and a mass core block 6 fixed in the outer frame, the sensitive comb teeth 3 are fixed on the outer walls of both sides of the outer frame 5 of the mass block, and the inner walls of both sides of the outer frame 5 of the mass block are fixed with combs The comb-shaped movable driving electrode 7, and the comb-shaped fixed driving electrode 8 matched with the comb-shaped movable driving electrode are fixed on the bottom plate of the housing; the electrodes 9, 10 are correspondingly fixed on the upper and lower end surfaces of the mass pellets and the top and bottom plates of the housing. .

[0019] The elastic beam 2 is a f...

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Abstract

The present invention relates to accelerometer gyroscope, and is an especially single chip double inertia parameter accelerometer gyroscope. The single chip double inertia parameter accelerometer gyroscope includes casing, mass block, which consists of outer frame and mass block core inside the outer frame, anchored with elastic beam to the casing bottom, comb capacitor fixed on two sides of the mass block with sensing comb teeth fixed onto the outer side walls of the outer frame, comb driver fixed in the inner side walls of the outer frame, and electrodes fixed to the top and bottom ends of the mass block core and the top and bottom of the casing. The present invention can detect two kinds of inertia parameters integrally, may sense the linear acceleration and angular acceleration in the same direction and is practical.

Description

technical field [0001] The invention relates to an accelerometer gyroscope, which belongs to the technical field of micro-mechanical electronics, in particular to a single-chip dual-inertia parameter accelerometer gyroscope. Background technique [0002] Micromachined accelerometers and micromachined gyroscopes are two very important miniature inertial sensors, and are also important components of miniature inertial navigation or guidance systems. Due to their outstanding advantages such as small size, light weight, low cost and high reliability, they are widely used in both military and civilian fields. [0003] It has been recognized that an accelerometer vibrating perpendicular to the sensing axis can be sensitive to the angular rate of rotation in a third axis perpendicular to the sensing axis and the axis of vibration. The inertial element developed by using this principle can be sensitive to linear acceleration and angular rate at the same time. This leads to the con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/00G01C19/5656G01P15/14
Inventor 刘俊张文栋熊继军任勇峰李锦明石云波唐军祁晓瑾
Owner ZHONGBEI UNIV
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