2D photoelectric auto collimation equipment and measuring method based on dynamic differential compensation process

A differential compensation and dynamic technology, applied in the direction of optical devices, measuring devices, instruments, etc., can solve the problem of poor measurement stability and repeatability of photoelectric autocollimators, difficulty in further improving measurement uncertainty, and limitations of photoelectric autocollimation In order to simplify the measurement process and data processing, improve measurement stability and repeatability, and meet the needs of high-precision two-dimensional small-angle measurement
CN1687702AActive Publication Date: 2005-10-26日照大象房屋建设有限公司

Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
日照大象房屋建设有限公司
Publication Date
2005-10-26

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Abstract

The invention belongs to the precise instrument manufacturing and detecting technology, especially relates to the bidimensional photoelectric self-alignment equipment and method based on dynamic differentiation compensation method. The equipment comprises the light source, the calibrated board, the CCD image sensor, the beam splitter prism, the aligning object lens, the measuring reflecting lens and the beam splitter between the aligning object lens and the reflecting lens. The two faces of the beam splitter are separately plated with the splitting film and the reflection reducing coating; the surface coarseness of the photic base plate is more than 0.08 um, and paralleling degree of the two faces is smaller than 10'; the light splitting ratio is 52 / 48 is less than or equal to T / R is less than or equal to 72 / 28 and the reflection reducing coefficient alpha is greater than or equal to 99%. The invention improves the stability and the repetition of the measuring.
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Description

technical field

[0001] The invention belongs to the technical field of precision instrument manufacturing and precision testing and measurement, and in particular relates to a high-precision two-dimensional photoelectric self-collimation device and a measurement method for real-time compensation of the angular drift of light beams based on a dynamic differential compensation method. Background technique

[0002] With the continuous improvement and improvement of measurement technology, the development of modern high-precision measurement technology and azimuth targeting and tracking system has put forward higher and higher requirements for the measurement accuracy of small angles. Photoelectric autocollimator plays an irreplaceable role in small-angle precision measurement, high-precision aiming and positioning. It can be used as a component of optical measuring instruments such as goniometers and optical comparators, and can also be used alone in measuring instruments for op...

Claims

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