System for monitoring resistance of electric fuse

Abstract

A fuse resistance monitoring system is disclosed to comprise at least one non-regenerative sense amplifier; at least one fuse module having at least one fuse cell coupled to a first terminal of the sense amplifier; and a reference resistor coupled to a second terminal of the sense amplifier, wherein a source voltage node between the fuse module and the sense amplifier is monitored to reflect a resistance of the fuse cell.

Description

technical field [0001] This invention relates to the design of integrated circuits, and more particularly to methods for monitoring the resistance of electrical fuses on a wafer. Background technique [0002] Fuse elements are widely used in semiconductor memory elements. A plurality of fuse elements are generally used in a semiconductor memory device such as a dynamic random access memory (DRAM). Generally, each fuse element includes a selectively severable fuse to selectively separate the fuse element from the rest of the circuitry. The process of cutting a fuse is sometimes referred to as "blowing" the fuse. [0003] There are basically two techniques currently used to blow fuses. One method uses a laser to irradiate the fuse until the fuse blows; the other method blows the fuse by sending a sufficiently large "overcurrent" through the fuse. The process of blowing a fuse in a fuse element (the element usually includes at least one MOS transistor) is generally called "...

AI Technical Summary

Problems solved by technology

When it is desired to detect the resistance value of an electric fuse, since a single electric fuse is hidden in the macro of a large group of electric fuses, it is difficult to distinguish its resistance value at this time, so only its logic state can be checked

The programming process and debugging thus become difficult

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