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Position detector for double grating displacement transducer metering mode and detection method thereof

A technology of displacement sensor and grating displacement, which is applied in the direction of measuring devices, optical devices, instruments, etc., and can solve problems such as limit detection speed and resolution constraints

Inactive Publication Date: 2006-02-08
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that a single precision grating displacement sensor cannot meet the requirements of large stroke, high speed and high precision position detection at the same time, a position detection device and its detection method with double grating displacement sensor counting method are provided. The use of a single precision displacement sensor in a high-speed, high-precision positioning system has the contradictory problem of the mutual restriction of the limit detection speed and resolution

Method used

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  • Position detector for double grating displacement transducer metering mode and detection method thereof
  • Position detector for double grating displacement transducer metering mode and detection method thereof
  • Position detector for double grating displacement transducer metering mode and detection method thereof

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specific Embodiment approach 1

[0007] Embodiment 1: This embodiment is described in conjunction with FIG. 1. The detection device of this embodiment is composed of a micron-scale grating displacement sensor 1, a nano-scale grating displacement sensor 2, and a counting and switching circuit 3. The micron-scale grating displacement sensor 1 The signal output end is connected to the coarse grating signal input end of the counting and switching circuit 3 , and the signal output end of the nanoscale grating displacement sensor 2 is connected to the fine grating signal input end of the counting and switching circuit 3 . In this specific embodiment, the micron-scale grating displacement sensor 1 adopts a grating displacement sensor with a micron-scale resolution, and the nano-scale grating displacement sensor 2 adopts a grating displacement sensor with a nanoscale resolution.

specific Embodiment approach 2

[0008] Specific embodiment two: illustrate this specific embodiment in conjunction with Fig. 1, the difference between this specific embodiment and specific embodiment one is: its counting and switching circuit 3 are by the counting circuit 3-1 that the first latch function is arranged, the first 2. A counting circuit 3-2 with a latch function and a central control and comparison circuit 3-3. The signal output end of the micron-scale grating displacement sensor 1 is connected to the signal input end of the first counting circuit 3-1 with a latch function. The data output end of the first counting circuit 3-1 with latch function is connected to the coarse raster data input end of the central control and comparison circuit 3-3, and the control signal input end of the first count circuit 3-1 with latch function is connected The coarse grating control signal output end of the central control and comparison circuit 3-3, the signal output end of the nanoscale grating displacement sen...

specific Embodiment approach 3

[0010] Specific embodiment three: this specific embodiment is described in conjunction with Fig. 1 and Fig. 2, the step of the detection method of this specific embodiment is: the first step: in a movement period ts of the system under test, the motion velocity of the system under test is at The acceleration process period 4, the constant speed process period 5 and the system movement speed V are greater than the maximum electrical allowable movement speed V of the nanoscale grating displacement sensor 2 s During period 6 of the deceleration process, the micron-scale grating displacement sensor 1 is always used to detect the displacement change of the system under test; the second step: when the system under test is at a system motion speed V less than the maximum electrical allowable moving speed of the nano-scale grating displacement sensor 2 V s During period 7 of the deceleration process, the nanoscale grating displacement sensor 2 is used to detect the displacement change...

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Abstract

The invention relates to a location testing apparatus of double-grating shift sensor numbering mode and its testing method. The output ends of the micrometer degree grating shift sensor 1 and the nanometer degree grating shift sensor 2 are separately connected with the two input ends of the numbering and switching circuit 3. The invention adopts double-grating shift sensor numbering mode, which uses micrometer degree grating shift sensor 1 to test high speed shift when it enters into high speed stage and uses nanometer degree grating shift sensor 2 to test low speed shift when it enters into low speed stage. The invention can achieve the cm degree testing stroke, m / s degree testing speed and nm degree testing precision.

Description

Technical field: [0001] The invention relates to the field of precision positioning technology in industrial motion, in particular to a large-travel, high-precision, high-speed position detection device based on a grating displacement sensor and a method thereof. Background technique: [0002] The speed and positioning accuracy of large stroke (cm level), high speed (m / s level) and high precision (μm to nm level) positioning systems for integrated circuit (IC) packaging, microelectromechanical system (MEMS) manufacturing and other fields Mainly depends on the position detection unit. The following problems exist in the position detection components of precision grating rulers widely used at present: the precision grating displacement sensor can achieve nanometer resolution, but due to the limitation of the scanning frequency of the signal detection circuit, the maximum electrical allowable moving speed of the precision grating displacement sensor and its resolution Inversel...

Claims

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Application Information

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IPC IPC(8): G01B21/02G01B11/02
Inventor 孙立宁刘延杰节德刚荣伟彬曲东升
Owner HARBIN INST OF TECH
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