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Boron phosphide-based semiconductor light-emitting device and production method thereof

A light-emitting device and semiconductor technology, which is applied in the manufacture of semiconductor/solid-state devices, semiconductor devices, electrical components, etc., can solve the problems that the emission intensity of boron phosphide-based semiconductor light-emitting devices cannot be increased, and the working current of the devices cannot be widely diffused.

Inactive Publication Date: 2006-02-15
SHOWA DENKO KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, using the conventional configuration in which the bottom of the electrode is brought into contact with the surface of the N-type or P-type conductive boron phosphide layer, the problem cannot be completely solved, wherein the current supplied for driving the light-emitting device (i.e., the device operating current), Flows from the bottom of the electrode into the layer below in a short circuit
Therefore, in the LED from which the emitted light is drawn out through the boron phosphide crystal layer provided on the light emitting layer to form an electrode, there arises such a problem that a wide spread of the device operating current in the light emitting region cannot be obtained.
Therefore, the increase in the emission intensity of boron phosphide-based semiconductor light-emitting devices cannot be fully obtained by increasing the light-emitting area at present.

Method used

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  • Boron phosphide-based semiconductor light-emitting device and production method thereof
  • Boron phosphide-based semiconductor light-emitting device and production method thereof
  • Boron phosphide-based semiconductor light-emitting device and production method thereof

Examples

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example 1

[0072] A boron phosphide-based compound semiconductor light emitting device according to the present invention will be described in detail below, taking as an example a light emitting diode (LED) using a pad electrode having a bottom surface in contact with a high resistance boron phosphide amorphous layer. figure 1 A cross-section of a stack structure 11 for manufacturing an LED 10 with a double hetero (DH) structure is schematically shown.

[0073] A phosphorus (p) doped n-type silicon (Si) single crystal is used as the substrate 101 . On the surface of the substrate 101, a lower cladding layer 102 composed of n-type boron phosphide (BP) is deposited by using an atmospheric pressure (near atmospheric pressure) metal organic vapor phase epitaxy (MOVPE) method. The lower cladding layer 102 is obtained by using triethylboron (chemical formula: (C 2 h 5 ) 3 B) As boron (B) source and using phosphine (chemical formula: PH 3) was deposited at 950°C as the phosphorus source. T...

example 2

[0083] The boron phosphide-based compound semiconductor light-emitting device according to the present invention will be described in detail below, taking as an example a double heterojunction (DH) light-emitting diode (LED) having a pad electrode having a bottom surface that is connected to a multilayer structure. surface contact with boron phosphide amorphous layer.

[0084] figure 2 is a schematic plan view of LED 12 according to Example 2. image 3 schematically shows the figure 2 A cross-section of LED 12 is shown taken by dashed line A-A'. exist figure 2 and 3 in, with figure 1 The same parts are denoted by the same reference numerals.

[0085] On the n-type GaN light emitting layer 104 formed in the same method as described in Example 1, an undoped p-type boron phosphide amorphous layer 201 was formed. The carrier concentration and thickness of the p-type boron phosphide amorphous layer 201 are respectively controlled to be 8×10 18 cm -3 and 12nm. On the p-...

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Abstract

A boron phosphide-based semiconductor light-emitting device, comprising: a crystalline substrate; a first semiconductor layer formed on said crystalline substrate, said first semiconductor layer including a light-emitting layer, serving as a base layer and having a first region and a second region different from the first region; a boron phosphide-based semiconductor amorphous layer formed on said first region of said first semiconductor layer, said boron phosphide-based semiconductor amorphous layer including a high-resistance boron phosphide-based semiconductor amorphous layer or a first boron phosphide-based semiconductor amorphous layer having a conduction type opposite to that of said first semiconductor layer; a pad electrode formed on said high-resistance or opposite conductivity-type boron phosphide-based semiconductor amorphous layer for establishing wire bonding; and a conductive boron phosphide-based crystalline layer formed on said second region of said first semiconductor layer, said conductive boron phosphide-based crystalline layer extending optionally to a portion of said boron phosphide-based semiconductor amorphous layer, wherein said pad electrode is in contact with said boron phosphide-based semiconductor crystalline layer at a portion of said pad electrode above the bottom of said pad electrode.

Description

[0001] Cross References to Related Applications [0002] This application is based upon an application filed under 35 U.S.C. §111(a) pursuant to 35 U.S.C. §119(e)(1), requiring a provisional application filed under 35 U.S.C. §111(b) on January 10, 2003 60 / 438,997 priority. technical field [0003] The present invention relates to a boron phosphide-based semiconductor light emitting device capable of obtaining high emission intensity and equipped with a pad electrode having a structure for efficiently providing a wide emission area and a method for manufacturing the same. Background technique [0004] In recent years, techniques for manufacturing light-emitting devices have been disclosed, such as light-emitting diodes (abbreviated as LED) and laser diodes (abbreviated as LD) from layers formed of boron phosphide (chemical formula: BP), which is a Group III-V compound semiconductors (see, eg, US Patent 6,069,021). Boron phosphide-based semiconductors tend to form a P-type c...

Claims

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Application Information

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IPC IPC(8): H01L33/00H01L21/20H01L33/16H01L33/32H01L33/34H01L33/38H01L33/40
Inventor 宇田川隆
Owner SHOWA DENKO KK
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