Boron phosphide-based semiconductor light-emitting device and production method thereof
A light-emitting device and semiconductor technology, which is applied in the manufacture of semiconductor/solid-state devices, semiconductor devices, electrical components, etc., can solve the problems that the emission intensity of boron phosphide-based semiconductor light-emitting devices cannot be increased, and the working current of the devices cannot be widely diffused.
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example 1
[0072] A boron phosphide-based compound semiconductor light emitting device according to the present invention will be described in detail below, taking as an example a light emitting diode (LED) using a pad electrode having a bottom surface in contact with a high resistance boron phosphide amorphous layer. figure 1 A cross-section of a stack structure 11 for manufacturing an LED 10 with a double hetero (DH) structure is schematically shown.
[0073] A phosphorus (p) doped n-type silicon (Si) single crystal is used as the substrate 101 . On the surface of the substrate 101, a lower cladding layer 102 composed of n-type boron phosphide (BP) is deposited by using an atmospheric pressure (near atmospheric pressure) metal organic vapor phase epitaxy (MOVPE) method. The lower cladding layer 102 is obtained by using triethylboron (chemical formula: (C 2 h 5 ) 3 B) As boron (B) source and using phosphine (chemical formula: PH 3) was deposited at 950°C as the phosphorus source. T...
example 2
[0083] The boron phosphide-based compound semiconductor light-emitting device according to the present invention will be described in detail below, taking as an example a double heterojunction (DH) light-emitting diode (LED) having a pad electrode having a bottom surface that is connected to a multilayer structure. surface contact with boron phosphide amorphous layer.
[0084] figure 2 is a schematic plan view of LED 12 according to Example 2. image 3 schematically shows the figure 2 A cross-section of LED 12 is shown taken by dashed line A-A'. exist figure 2 and 3 in, with figure 1 The same parts are denoted by the same reference numerals.
[0085] On the n-type GaN light emitting layer 104 formed in the same method as described in Example 1, an undoped p-type boron phosphide amorphous layer 201 was formed. The carrier concentration and thickness of the p-type boron phosphide amorphous layer 201 are respectively controlled to be 8×10 18 cm -3 and 12nm. On the p-...
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