Chemical etching solution for titanium and titanium alloy

A chemical etching and titanium alloy technology, which is applied in the field of chemical etching solutions for titanium and titanium alloys, can solve the problems that the chemical etching solutions for titanium and titanium alloys have not been reported yet, and achieve small side erosion, fast etching, and fast corrosion speed Effect

Inactive Publication Date: 2006-03-08
OCEAN UNIV OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing chemical etching solutions are mainly for the microfabrication of metals such as stainless steel, copper, and nickel, but the chemical etching solutions for titanium and titanium alloys have not been reported yet.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0008] Mix 50 ml of hydrofluoric acid (40% aqueous solution, density 1.13), 150 ml of nitric acid (67% aqueous solution, density 1.40) with 800 ml of water, and the obtained etching solution is prepared according to the existing etching process. Chemically etched industrially pure titanium TA2 (the plate component of the fuel cell). The etching temperature is 30°C. During operation, a 0.08mm thick titanium (TA2) plate is immersed in the solution for about 2 minutes. After about 2 minutes, it is corroded and worn out. The minimum wire diameter is 0.02mm and the aperture is 0.2mm. The service life of this solution can reach 32 grams of titanium dissolved per liter.

Embodiment 2

[0010] Mix 120 ml of hydrofluoric acid (40% aqueous solution, density 1.13), 350 ml of nitric acid (67% aqueous solution, density 1.40) with 530 ml of water, and use the obtained etching solution according to the existing etching process. Chemically etched industrially pure titanium TA2 (the plate component of the fuel cell). The etching temperature was 20°C. During the operation, a 0.3mm thick titanium (TA2) plate was immersed in the solution, and it was corroded and worn out after about 8 minutes. The minimum wire diameter was 0.5mm, and the hole diameter was 0.8mm.

Embodiment 3

[0012] 50 ml of hydrofluoric acid (40% aqueous solution, density 1.13), 150 ml of nitric acid (67% aqueous solution, density 1.40), 0.2 g of EDTA and 800 ml of water were mixed together, and the resulting etching solution was Some etching processes chemically etch industrially pure titanium TA2 (the plate component of the fuel cell). The etching temperature was 25°C. During the operation, a 0.08mm thick titanium (TA2) plate was immersed in the solution, and it was corroded and rotten after about 2 minutes. The minimum wire diameter was 0.02mm, and the hole diameter was 0.2mm. The service life of this etching solution can reach 75 grams of titanium dissolved per liter.

[0013] In order to prolong the service life of the solution, a small amount of disodium ethylenediaminetetraacetate (EDTA) can be added, and the dosage is in the range of 0.01~1g / L; the temperature range of this chemical etching solution is 0~40℃, and it can be used in Two processing methods in static or flow...

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Abstract

A chemical etching solution used in Ti and Ti alloys characterizes that it is composed of H2F2, HNO3 and water, their volume percentage is: H2F2 5-15% HNO3 8-35%, water 50-85%, which can be used under normal temperature having the advantages of quick corrosion, small side corrosion, long life time of the solution and low process cost.

Description

technical field [0001] The invention relates to a chemical etching solution, in particular to a chemical etching solution suitable for titanium and titanium alloys. Background technique [0002] Chemical etching is a process of rapidly dissolving and removing unwanted metals through chemical reactions using the corrosive action of chemical solutions. The basic process of chemical etching is: the initial metal parts are routinely cleaned and degreasing to make the surface clean, and then photoresist is coated on the surface, and the photoresist is exposed according to the processing pattern, and then developed and hardened. , and then use the chemical etching solution to corrode the exposed metal. After the corrosion process is completed, the glue on the surface is removed with a strong alkaline solution, and finally washed with water to obtain an etched workpiece product. [0003] At present, the existing chemical etching solutions are mainly chemical etching solutions for ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/26
Inventor 徐海波王佳姜应律王伟王燕华
Owner OCEAN UNIV OF CHINA
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