Self-scanning projection measuring device for two-dimensional configuration outline
A measuring device and self-scanning technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of large system structure and motion error, etc., and achieve the effects of short optical path, simple manufacturing, and simple optical noise.
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[0025] In this embodiment, a laser with a power of mW is used, for example, a semiconductor laser with a wavelength of λ=0.670 μm. The beam expander can be composed of a lens group with a beam expansion factor greater than 10 times, for example, a concave lens with a focal length of -15mm and a convex lens with a focal length of 200mm, and the distance between the lens groups can be fine-tuned. The optical slit is a long slit with a width less than 1 mm and a straightness error of 1 / 10 of the slit width; the optical slit linear scanner can be a pair of rotating shafts. The cylindrical lens assembly can be composed of a cylindrical lens and an imaging lens group. The CCD can be a linear array CCD or an area array CCD.
[0026] The present invention has poor performance in measuring the two-dimensional profile of the same measurement resolution in the length and width directions, but the ratio of the dimensions in the length and width directions is large (>10) and the measureme...
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