The invention discloses a hemispherical
harmonic oscillator
surface shape measuring method based on a multi-
wavelength measuring head in the technical field of precision measurement. The hemispherical
harmonic oscillator
surface shape measuring method comprises the steps that initial calibration is conducted on the position and posture between the multi-
wavelength interference measuring head and a hemispherical
harmonic oscillator; in the process that the multi-
wavelength interference measuring head does linear scanning motion and the hemispherical
harmonic oscillator does rotating motion, measuring the inner surface and the outer surface of the hemispherical
harmonic oscillator through the multi-wavelength interference measuring head after initial calibration to obtain measuring
point data; performing data fitting on the measured data of the measurement points, and establishing a fitting model of the measurement points and the measurement data; calculating the distance between the inner surface and the outer surface of the hemispherical
resonator corresponding to the
measurement point based on the fitting model to obtain a calculation result; and converting the calculation result into a
point cloud to generate the inner and outer surface morphology of the hemispherical
harmonic oscillator. By
processing and analyzing the reflected light signals of multiple wavelengths, the morphological characteristics of the inner surface and the outer surface of the hemispherical
resonator can be accurately calculated, and compared with single-wavelength detection, the method is more convenient and higher in detection precision.