Solid-state imaging device and solid-state imaging device manufacturing method

Abstract

To provide a solid-state imaging device capable of improving color mixing, line shading, and sensitivity errors from adjacent color filter layers. It is a solid-state imaging device (1) in which a plurality of pixels having a photoelectric conversion element (13) and a color filter layer (21) formed on the photoelectric conversion element (13) are arranged in a matrix on a semiconductor substrate (11). ), in addition, on the boundary area with the adjacent photoelectric conversion element (13), there is a resin portion (20) formed protruding from the formation surface, and each color filter layer (21) is formed on the adjacent resin portion (20) ), the film thickness of each color filter layer (21) in the peripheral portion corresponding to the top portion is formed thinner than that in the central portion.

Description

technical field [0001] The present invention relates to a solid-state imaging device having a monolithically integrated color filter layer and a method of manufacturing the same. Background technique [0002] In recent years, with the development of image colorization, single-board color solid-state imaging devices, digital still image cameras centered on CCD (charge-coupled device) types, and mobile phones with cameras centered on CMOS types The use of them is rapidly increasing, and the requirements for miniaturization and high pixelation of solid-state imaging devices with monolithic integrated color filters are also increasing. However, due to the demand for such solid-state imaging devices, the light-receiving area of ​​the photoelectric conversion element serving as the light-receiving sensor portion has been reduced. As a result, the photoelectric conversion characteristics (photosensitivity), which are the main characteristics of the solid-state imaging device, have ...

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Problems solved by technology

However, although the dimples are somewhat improved in the cross-sectional shape, the problem cannot be solved with the prior art

[0023] When this pit is coated with a filter material equivalent to the second layer, a cavity β is generated on the boundary portion with the first layer (see image 3 ), as a result, light scattering, color mixing, line shading, and sensitivity errors deteriorate, and, through the subsequent heat treatment, the gas remaining in the cavity β expands, and the color filter layer 41, transparent planarizing film 42, microlens 43 Deformation also has a huge impact on reliability

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