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Method and apparatus for enhancing measuring sensitivity of rotating corner

A roll angle measurement and sensitivity technology, applied in the field of angle optical measurement, can solve the problems of expensive lasers, inconvenient on-site measurement, and inconvenient instrument structure, and achieve the effect of eliminating additional errors, facilitating on-site measurement, and having a compact structure.

Inactive Publication Date: 2006-06-14
BEIJING JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The moving part of this method has cables, which brings inconvenience to on-site measurement
The Chinese patent No. 01130893.1 uses a half-wave plate as a sensitive device. This method measures the roll angle by detecting the phase, but the laser is expensive and the control circuit is extremely complicated.
Chinese Patent Publication No. 1687701A uses a quarter-wave plate as a roll angle sensitive device, and uses a Wollaston prism to split the beam, and obtains the roll angle by detecting the change in the light intensity of the two split beams, but the measurement sensitivity is not high enough.
Among them, the latter two methods are to fix the reflector on the other side of the measuring guide rail so that the optical path passes through the roll angle sensitive device twice, but neither can make the reflector move together with the roll angle sensitive device
The former is because the movement of the reflector with the guide rail will affect the phase change, which will bring additional errors to the measurement; the latter will bring changes to the light intensity difference between the two split beams due to the movement of the reflector, which will also bring additional errors to the measurement
Therefore, both methods do not allow the reflector to move with the measuring rail, making the instrument less compact

Method used

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  • Method and apparatus for enhancing measuring sensitivity of rotating corner
  • Method and apparatus for enhancing measuring sensitivity of rotating corner
  • Method and apparatus for enhancing measuring sensitivity of rotating corner

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Experimental program
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Effect test

Embodiment approach 1

[0049] Implementation mode one ( figure 1 )

[0050] A device for improving the sensitivity of roll angle measurement, comprising: a laser 1, a polarizer 2, a beam splitter 3, a convex lens 4, a Wollaston prism 5, a detector 6, a signal processing circuit 7, a computer 8, and a plane mirror 9 , quarter wave plate 10, reflector 11;

[0051] The beam splitter 3 is placed in the fixed unit 101, on the optical path between the polarizer 2 and the mobile unit 201; the quarter wave plate 10, the reflector 11 and the plane reflector 9 are along the direction of the incident light Arranged in the mobile unit 201 in sequence; the convex lens 4 is placed between the beam splitter 3 and the Wollaston prism 5 or between the detector 6 and the Wollaston 5; the detector 6 is placed on on the focal plane of the convex lens 4.

[0052] The reflector also includes: a corner cube prism or a rectangular prism.

[0053] A method for improving roll angle measurement sensitivity is as follows: ...

Embodiment approach 2

[0060] Implementation mode two ( Figure 4 ):

[0061] Its components and parameters are basically the same as those in the first embodiment, but the positions of the Wollaston prism 5 and the convex lens 4 are reversed to obtain the same measurement effect.

Embodiment approach 3

[0062] Implementation mode three ( Figure 5 ):

[0063] Its components and parameters are basically the same as the first embodiment, except that a steering unit 301 (pentagonal prism 12) is added between the mobile unit 101 and the fixed unit 201, so that the device can be directly applied to the roll angle measurement of the vertical guide rail.

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Abstract

The invention relates to a method and device used to increase rolling angle measuring sensitivity. It belongs to photoelectric detection technique field. It is orderly set quarter wave plate, reflector, and plane reflecting mirror on light axis after collimation laser through polarizer and semi lens reflecting mirror; utilized plane reflecting mirror to make the light oppositely through reflector for two times, and quarter wave plate for four times. It can raise measuring sensitivity for two times based on 1687701A patent disclose number, and make the reflector move together with the rail to eliminate additive error, made the apparatus structure more compact to enhance its practicability at the same time. In addition, a receiving unit is added to realize rolling angle, pitch angle, deflection angle paralleling real time high accuracy measurement under the condition of unchanging measuring light path.

Description

technical field [0001] The invention belongs to the technical field of angle optical measurement, in particular to a roll angle measurement method and a roll angle measuring instrument thereof. Background technique [0002] Roll angle is an important parameter in error compensation. Systems such as machine tools and three-coordinate measuring machines need to measure roll angles, pitch angles, and yaw angles in order to correct Abbe errors in real time. In addition, in the installation and calibration of some workpieces, it is also necessary to measure or position the roll angle. [0003] For the optical measurement method of linear guide roll angle, the laser polarization measurement method is a method that has been studied more at present. Zhang Enyao of Tsinghua University and others disclosed a roll angle photoelectric detection method and device based on orthogonal double polarized light in Chinese patent No. 02123642. The device mainly uses time-sharing modulation o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
Inventor 匡翠方冯其波张志峰张斌陈士谦
Owner BEIJING JIAOTONG UNIV
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