Multifunction chip-detecting apparatus
A chip detection, multi-functional technology, applied in measurement devices, material analysis by optical means, instruments, etc., can solve problems such as single function, and achieve the effect of flexible use, wide wavelength range, and wide application range
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[0046] The present invention will be further described below in conjunction with accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0047] Such as Figure 1 to Figure 3 Shown, the present invention is a kind of multifunctional chip detection device, and its composition comprises:
[0048] A frame and a chip platform 7 also include:
[0049] ① Detection optical path module 1 (such as figure 1 Shown) is a template for fixedly setting the detection optical path, and its optical path is constituted as follows: a light source 101, the first optical filter 102 and the half mirror 103 are sequentially arranged on the same optical axis along the advancing direction of the light beam sent by the light source 101 , the half-mirror 103 is placed at 45° with the above-mentioned light beam, the direction of the light beam reflected by the half-mirror 103 is the objective lens group 104, and the light beam passing through the objectiv...
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