Negative photosensitive resin composition and negative photosensitive element
A technology of photosensitive resin and composition, which is applied in optics, optomechanical equipment, nonlinear optics, etc., and can solve problems such as uneven display, large deviation of film thickness, and inconvenient operation
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Embodiment 1
[0068] [Negative photosensitive resin composition in which the monofunctional reactive monomer accounts for 50% or more of the total mass fraction of the reactive monomer]
[0069] Prepare a negative photosensitive resin composition with the composition shown in Table 1, apply it on a glass substrate (3cm×3cm, thickness 0.5mm) by spin coating, and dry it for 3 minutes using a hot air convection dryer at 110°C , form a negative photosensitive resin composition layer (thick 4 μm), make a glass substrate, a laminate of negative photosensitive resin composition layers ( figure 1 ). On the above laminated substrate, a photomask was provided across a space of 100 μm on the side of the negative photosensitive resin composition layer. From the photomask side, it is irradiated with 100mJ / cm with a 3kW ultra-high pressure mercury lamp (HMW-590, manufactured by O-ku Seisakusho Co., Ltd.) 2 UV rays ( figure 2 ). After the ultraviolet exposure, the laminate was subjected to jet develo...
Embodiment 2
[0071] On a polyethylene terephthalate film (support) with a thickness of 50 μm using a die coating method, the negative-type photosensitive resin composition of Example 1 is coated with a film thickness of 4 μm when dried, and is coated with 110 μm. After drying in a hot air convection dryer at ℃ for 3 minutes, cover it with a 30 μm thick polypropylene film as a cover film to make a negative photosensitive element. While peeling off the polypropylene film of the obtained negative photosensitive element, the negative photosensitive resin composition layer is pasted and bonded (layer) with the conditions of 130° C. of roll temperature, 1500 N / m of roll line pressure, and 1.0 m / min of speed. press) on a glass substrate (3 cm x 3 cm, thickness 0.5 mm) to prepare a laminated substrate of a glass substrate, a negative photosensitive resin composition layer, and a support. The support body of the above-mentioned substrate was peeled off, and exposure, development, and curing were pe...
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