System and method for measuring phase
A phase, low coherence technique for use in the field of systems and methods for phase measurement
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Embodiment 1
[0435] Example 1: Phase imaging of calibration samples
[0436] In this example, calibrated samples were studied and illustrated that the present invention can provide quantitative information at the nanometer (nm) scale. The samples consisted of metal deposits on a glass substrate, which were then etched. The metal deposit pattern is in the shape of a figure "8" and the thickness of the metal layer is about 140nm as measured by a microscopic light wave interferometer.
[0437] Figures 60A-60D show images acquired by the system using reflection geometry at four different phase shifts δ. Figure 60A is an image 2000 for δ=0; Figure 60B is an image 2200 for δ=π; Figure 60C is an image 2400 for δ=π / 2; and Figure 60D is an image 2600 for δ=3π / 2.
[0438] Figure 61 Schematically illustrates the electric field vector E 2102 and the high frequency wave vector component E of the electric field H and the low frequency wave vector component E of this electric field L The...
Embodiment 2
[0442] Example 2: Phase Imaging of Phase Grating
[0443] Figure 64 A phase image 2400 of a phase grating with trenches nominally 10 microns wide and nominally 266 nm deep obtained using transmission geometry is shown. exist Figure 64 Among them, the unit of Z axis 2402 is nm, and the unit of Y axis 2404 and X axis 2406 is CCD pixel. Vertical scale 2408 is also in nm and is provided to further aid in determining depth (Z-axis dimension) from phase image 2400 .
Embodiment 3
[0444] Example 3: Phase image of onion cells
[0445] In this example, onion cells were phase imaged using transmission geometry in accordance with the present invention. An intensity image 2500 of onion cells is shown in FIG. 65 for comparison with a phase image 2550 shown in FIG. 66 . In Figures 65 and 66, the y-axis 2502, 2552 and the x-axis 2504, 2554 are in units of CCD pixels. Scale bar 2556 in Figure 66 is in nm.
[0446] The intensity image (FIG. 65) represents the first frame taken without a phase shift δ=0 between the low and high frequency components. As shown by comparing Figure 65 and Figure 66, the conventional microscope (intensity) image has very low contrast relative to the phase image obtained in accordance with the present invention. As seen in Figure 66, the contrast in the phase image is greatly enhanced, and in this case much finer cellular structures can be distinguished. In addition, the information in the phase image is quantified to nano...
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