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Methods of manufacturing a crystal-oriented ceramic and of manufacturing a ceramic laminate

A technology of ceramic layers and piezoelectric materials, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, layered products, piezoelectric/electrostrictive/magnetostrictive devices, etc. -Deterioration of piezoelectric properties of oriented ceramics, taking a long time to calcine, etc., to achieve the effects of reducing manufacturing costs, omitting template preparation steps, and high power

Inactive Publication Date: 2006-09-13
DENSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such cracks 99 will cause crystal-oriented ceramics to crack, etc., and there is also a possibility that the piezoelectric characteristics of the crystal-oriented ceramics will be lowered.
Since the shrinkage factors of the piezoelectric material and the template are different during calcination, there is a problem that microvoids and internal stress are easily generated
[0009] In addition, in the conventional method of producing crystal-oriented ceramics using a template, there are problems such as taking a long time for calcination and increasing the production cost

Method used

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  • Methods of manufacturing a crystal-oriented ceramic and of manufacturing a ceramic laminate
  • Methods of manufacturing a crystal-oriented ceramic and of manufacturing a ceramic laminate
  • Methods of manufacturing a crystal-oriented ceramic and of manufacturing a ceramic laminate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0122] Next, we will use the Figure 1-7 The embodiments of the present invention will be further described.

[0123] In this example, a crystal-oriented ceramic composed of a perovskite structure (ABO 3 ) composed of polycrystalline substances, and the crystal planes of each grain that constitutes the polycrystalline substances are oriented.

[0124] In this example, a tablet preparation step, a crystallization-promoting layer formation step and a calcination step were performed. During the tablet preparation steps, such as figure 1 As shown, a green sheet 1 composed of a piezoelectric material forming a polycrystalline substance of a perovskite structure was produced by calcination.

[0125] In the crystallization-promoting layer formation step, such as figure 1 As shown, a crystallization-promoting layer 15 comprising crystallization-promoting material particles 151 that enable growth of crystal grains in a polycrystalline mass upon firing is formed so as to be in con...

Embodiment 2

[0151] This example is an example of producing crystal-oriented ceramics by forming a crystallization-promoting layer on a green sheet containing template particles.

[0152] The crystal-oriented ceramics in this example consist of a polycrystalline substance containing a perovskite structure compound as a main component {Li 0.04 (K 0.5 Na 0.5 ) 0.96}(Nb 0.86 Ta 0.1 Sb 0.04 )O 3 , which was in the shape of a plate, and, like Example 1, had a cylindrical shape with an area of ​​52 square millimeters (8.5 mm in diameter) and a thickness of 80 μm.

[0153] The following will use Figure 8-1 5 to describe the details of the preparation method of the crystal-oriented ceramics in this embodiment.

[0154] First, template particles and piezoelectric materials are prepared, the template particles are composed of perovskite-type compounds, and the specific crystal planes (orientation planes) of the polycrystalline substances of the obtained crystal-oriented ceramics in the temp...

Embodiment 3

[0172] In Examples 1 and 2, crystal-oriented ceramics were prepared by forming a crystallization-promoting layer on a green sheet. This example is an example of producing crystal-oriented ceramics by forming a crystallization-promoting layer between green sheets.

[0173] Specifically, in the same manner as in Example 1, two green sheets having a thickness of 100 µm were prepared by using the slurry.

[0174] Then, the crystallization-promoting material particles made of MgO 2 Constituent particles (average particle size 0.8 μm) were dispersed in the slurry that had been used for the green sheet, and as Figure 16 As shown, the crystallization-promoting layer 15 is formed by applying a slurry on a green sheet 12 to a thickness of about 10 micrometers. Then, another green sheet 13 is stacked on the crystallization-promoting layer 15 to prepare a three-layer green sheet 1 . As shown in the figure, the crystallization-promoting layer 15 of the present embodiment includes a pie...

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Abstract

A method for manufacturing a crystal-oriented ceramic comprising a sheet-making step, a crystallization-promoting layer-forming step and a calcining step is provided. At the sheet-making step, a green sheet 1 is made. At the crystallization-promoting layer-forming step, a crystallization-promoting layer 15 containing crystallization-promoting material particles 151 is formed so as to contact the green sheet 1 . At the calcining step, the green sheet is calcined. A method for manufacturing a ceramic laminate comprising a laminate-making step and a calcining step is provided. At the laminate-making step, a laminate is made, where green sheets and electrode-printed layers are stacked. The crystallization-promoting layer, containing the crystallization-promoting material particles, which allow crystal grains in a polycrystalline substance to grow during calcining, is formed so as to contact the green sheet. At the calcining step, the laminate is calcined.

Description

technical field [0001] The present invention relates to a method for the manufacture of crystal-oriented ceramics composed of a perovskite structure (ABO 3 ) of a polycrystalline substance composition; and a method of manufacturing a ceramic laminate in which crystal-oriented ceramics and internal electrode layers are laminated. Background technique [0002] Piezoelectric ceramics have been widely used in the fields of electronics and mechatronics in the past. Piezoelectric ceramics are subjected to a so-called poling process, in which an electric field is applied to the ferroelectric ceramics in order to orient the ferroelectric domains in a fixed direction. In the case of piezoelectric ceramics, for spontaneous polarization orientation in a fixed direction by polarization treatment, an isotropic perovskite crystal structure is advantageous because this structure enables the direction of spontaneous polarization to be is three-dimensional. Therefor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/46C04B35/622C04B35/00C04B35/64H01L41/083H01L41/187H01L41/22H01L41/297H01L41/39H01L41/43
CPCC04B35/495C04B2235/768C04B2235/3206B32B2315/02C04B2235/3201C04B2235/3232C04B2235/3217C04B2235/3873H01L41/273H01L41/083C04B2235/3251C04B2235/6025C04B2235/787C04B2235/3826C04B2235/3294C04B2237/345C04B35/62218C04B2235/3203C04B37/008H10N30/50H10N30/053
Inventor 门谷成岩濑昭夫
Owner DENSO CORP