Coating device
A coating device and coating technology, applied in the direction of the surface coating liquid device, display device, spraying device, etc., can solve the problems of nozzle 202 skew, interval deviation, uneven coating, etc., to prevent deviation and suppress Effect of uneven coating and preventing skew
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[0030] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
[0031] figure 1 It is a schematic side view showing an embodiment of the coating device of the present invention. figure 2 Yes means figure 1 The front view of the coating system. image 3 Yes means along figure 2 Sectional view of the line III-III.
[0032] Such as figure 1 As shown, the coating device 10 is configured to include: a base frame 12; a coating system 30 arranged on the base frame 12; a movable frame 16, which is supported on the base frame 12 and can move horizontally; and a suction table (hereinafter referred to as The stage) 24 is arranged on the moving frame 16 to adsorb the substrate 28; and the holding system 26 is capable of holding the substrate 28 in a freely detachable manner.
[0033] The above-mentioned substrate 28 is a photomask member in which a light-shielding film is formed on a transparent substrate. The coating liquid applied...
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