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Dual-axis resonance type micromechanical accelerometer

An accelerometer and resonance technology, which is used in the measurement of acceleration, velocity/acceleration/shock measurement, measurement devices, etc., can solve the problem of insufficient sensitivity and resolution, and achieve high resolution, differential output, and good manufacturability. Effect

Inactive Publication Date: 2006-10-11
BEIHANG UNIV
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  • Application Information

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Problems solved by technology

[0004] The technical problem of the present invention is to overcome the deficiencies of the prior art and provide a high-precision dual-axis resonant micro-machined accelerometer to solve the problems that the existing micro-machined accelerometers are mostly single-axis, and the sensitivity and resolution are not high enough. Achieve high-precision two-dimensional acceleration measurement

Method used

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  • Dual-axis resonance type micromechanical accelerometer

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Embodiment Construction

[0009] Such as figure 1 As shown, the present invention includes a substrate 1, a mass block 2, 8 cantilever beams 11, 17, 21, 27, 31, 37, 41, 47, 4 lever amplification mechanisms 12, 22, 32, 42, 4 tuning forks 18, 28, 38, 48, 4 sets of drive electrodes, detection electrodes, tooth pivots and 4 stops 13, 23, 33, 43, the whole structure is a centrally symmetrical figure, and a mass block 2 is sensitive to two orthogonal directions acceleration. The mass block 2 is in the shape of "back", and in the middle of the mass block 2 are 8 cantilever beams 11, 17, 21, 27, 31, 37, 41, 47, 4 lever amplification mechanisms 12, 22, 32, 42, 4 Tuning forks 18, 28, 38, 48 and 4 groups of tooth hubs, drive electrodes, and detection electrodes. The elastic support composed of 8 cantilever beams 11, 17, 21, 27, 31, 37, 41, 47 skillfully realizes the decoupling of two orthogonal directions, so that the sensitivity and resolution of the two directions are high; the lever The mechanism 12 is comp...

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Abstract

The invention discloses a dual-axle resonance micro chemical accelerometer, which comprises a basic plate, a weigh block, suspend beams, a lever amplifying device, a sound fork, a driving electrode, a detecting electrode, a tooth axle and a backstop. Wherein, the weight block is circle whose middle part is mounted with a suspend beam, a lever amplifying device, a sound fork, a driving electrode, a detecting electrode, a tooth axle; the backstop is outside the weight block; the circle shape of weight block can make the element own larger weight block in limited volume; eight suspend beams form the flexible support to realize decouple in two orthogonal directions to improve the sensitivity and resolution in said two directions; the resonance beam has two ends to be fixed with sound forks, while two ends are connected to the outer element with narrow necks, to effectively reduce the energy couple between the resonance beam and outer structure; two symmetry sound forks can realize differential output of resonance frequency. The invention can improve the sensitivity, resolution and detecting accuracy of accelerometer.

Description

technical field [0001] The invention belongs to the field of micromechanical sensors in MEMS (micro-electromechanical systems), and it is widely used in the fields of automotive electronics, aerospace, weaponry and the like as a micro-inertial device. Background technique [0002] MEMS is in the development period, its technology and market are not yet mature, but its broad development prospects, huge social and economic benefits are well known to the world, and micro-machined accelerometers are one of the most successful representatives. The research on micro-machined accelerometers began in the early 1970s, and formed single-axis micro-machined accelerometer products in the 1980s. In the late 1990s, multi-axis micro-machined accelerometers appeared. The most representative one on the market is the American AD The company's ADXL series of micromachined accelerometers. [0003] Micromachined accelerometers have developed rapidly, and there are various forms such as piezores...

Claims

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Application Information

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IPC IPC(8): G01P15/097
Inventor 樊尚春任杰
Owner BEIHANG UNIV
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