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Method and device for precisely determining optical system focus surface by interferometer

An optical system and focusing surface technology, applied in optics, measuring devices, optical components, etc., can solve the problems of difficult system installation, inability to determine the focal plane of the system, lack of versatility, etc. The effect of solving blindness and improving positioning accuracy

Inactive Publication Date: 2006-11-08
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

CN00130721.5 installs and adjusts the optical system with a spectrometer, light of other wavelengths is needed during the adjustment process, and the focal plane of the system cannot be determined; CN200420012162.9 includes too many components, and the experience of the adjustment personnel is more important. The system is difficult to install and adjust; CN99251361.8 involves adjusting the focus plane, but it still needs to rely on high-precision machining and lacks versatility

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  • Method and device for precisely determining optical system focus surface by interferometer
  • Method and device for precisely determining optical system focus surface by interferometer
  • Method and device for precisely determining optical system focus surface by interferometer

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0029] see first figure 1 , figure 1 The basic working principle of the method and device for accurately determining the focal plane of the optical system is described. As can be seen from the figure, the present invention uses an interferometer to accurately determine the method for the focal plane of an optical system, which is characterized in that the method includes the following steps:

[0030] (1) Select the Fizeau laser interferometer 1 as the detection instrument for determining the focal plane of the optical system 2, and the standard plane of the interferometer matches the optical system 2 under test;

[0031] (2) The detection beam emitted by the laser interferometer 1 is incident on the measured optical system 2, and the center of the outgoing light of the de...

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Abstract

This invention discloses a method and a device for applying an interferometer to determine focusing faces of an optical system accurately, in which, the working principle is that the standard light emitted by a laser interferometer is reflected back to the interferometer after passing through a tested optical system and the focusing face of an optical system is determined by the principle that it is easy for it to get interference fringes at the cat-eye position so as to increase the location accuracy of the focusing faces of an optical system.

Description

technical field [0001] The invention relates to the measurement of an optical system, in particular to a method and a device for accurately determining the focal plane of an optical system by an interferometer. technical background [0002] With the development of science and technology and the improvement of computer technology, the requirements for optical systems are getting higher and higher, so the requirements for various optical components are also getting higher and higher, and interference detection has been continuously improved accordingly. Now the measurement accuracy of the interferometer is constantly improving, and it has been more and more widely used in optical adjustment. [0003] In order to improve the precision of the optical system, many patents relate to assembling the optical system, such as CN00130721.5, CN200420012162.9, CN99251361.8. CN00130721.5 installs and adjusts the optical system with a spectrometer, light of other wavelengths is needed duri...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/62G01J3/00
Inventor 曹晓君朱健强林强杨毓
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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