Magnetic detecting element having rie-resistant film and method of manufacturing the same
The technology of a magnetic detection element and manufacturing method, which is applied in the manufacture/processing of electromagnetic devices, the manufacture of magnetic flux-sensitive magnetic heads, magnetic recording, etc., can solve the problems of inability to properly form the magnetic detection element with regenerative characteristics, corrosion of the free magnetic layer 5, etc.
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[0049] figure 1 It is a partial cross-sectional view showing the structure of the tunnel-type magnetic detection element according to the present embodiment, cut in a direction parallel to the facing surface of the recording medium.
[0050] The tunnel-type magnetic detection element is installed on the driven-side end of a floating slider provided on the hard disk device, etc., and detects a recording magnetic field of the hard disk or the like. In the figure, the X direction is the track width direction, the Y direction is the direction (height direction) of the leakage magnetic field from the magnetic recording medium, and the Z direction is the moving direction of the magnetic recording medium such as a hard disk and the above-mentioned tunnel type magnetic detection element. As for the stacking direction of the layers, the X-Z plane is a plane parallel to the opposing surface of the recording medium.
[0051] Reference numeral 20 denotes a lower shield layer, and the lo...
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