Strong magnetic filed Hall effect testing apparatus and testing method thereof

A Hall effect and testing device technology, applied in the field of testing, can solve the problems of error-prone, low efficiency and poor reliability of manual data processing, etc.

Inactive Publication Date: 2006-12-27
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, manual adjustment of current calculation data is usually used, which often produces human errors and a series of problems: (1) manual reading and adjustment of current have ob

Method used

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  • Strong magnetic filed Hall effect testing apparatus and testing method thereof
  • Strong magnetic filed Hall effect testing apparatus and testing method thereof
  • Strong magnetic filed Hall effect testing apparatus and testing method thereof

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[0024] by figure 1 It can be seen that the Hall effect test device with a strong magnetic field of the present invention consists of an epitaxial wafer 1, an electromagnet group 2, a constant current source 3, a polarity control circuit 4, a controllable voltage stabilizer source 5, a measuring circuit 6, The computer 7, three-phase alternating current 8, temperature control device 9, etc. are connected. Specific wiring connection: the output control line of the computer 7 is connected to the polarity control circuit 4 and the controllable voltage stabilizer source 5; the output line of the measurement circuit 6 is connected to the input control line of the computer 7; the output line of the constant current source 3 is connected to the pole The input line of the control circuit 4 is connected; the input and output lines of the epitaxial wafer 1 are respectively connected with the output and input control lines of the polarity control circuit 4; the output line of the controllabl...

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Abstract

The invention relates to a Hall-effect tester of strong magnetic field, wherein said device is formed by extending sheet, electromagnet group, constant-current source, polarity control circuit, controllable stable voltage source, testing circuit, computer, three-phase alternative-current source, and temperature controller. And said testing method comprises: (1), making the extending sheet into electrode, and connecting the wires; (2), connecting three-phase alternative-current source, operating the computer control program, based on the program demand, inputting each parameter; (3), testing relative parameters in new balance temperature, when changing the sample condition temperature; (4), storing or printing the measure result.

Description

technical field [0001] The invention relates to the technical field of testing, in particular to a high magnetic field Hall effect testing device and a testing method thereof. Background technique [0002] Hall effect test is a basic test method in the field of semiconductor material research, which can measure many properties of semiconductor epitaxial films, such as conductivity type, resistivity, sheet resistance, carrier concentration, mobility, etc. of semiconductor materials. For wide-bandgap semiconductor materials, p-type doping has always been a major difficulty in their wide application. Unintentionally doped wide-bandgap materials usually exhibit n-type due to the vacancies of wide-bandgap semiconductor materials and the like. Therefore, in order to obtain P-type materials, heavy doping must be carried out, so that the apparent hole concentration greatly exceeds the electron concentration, and the n-type carriers formed by vacancies and other reasons are recombin...

Claims

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Application Information

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IPC IPC(8): G01R31/26G01R33/00
Inventor 张攀峰吴洁君胡卫国刘祥林
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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