Thin film transistor, display, liquid crystal display, and method of manufacturing them

A technology for thin film transistors and display devices, which is used in the fields of display devices, wiring, and thin film transistors, and can solve problems such as inability to handle the surface of display panels.
CN1890787AInactive Publication Date: 2007-01-03SEMICON ENERGY LAB CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SEMICON ENERGY LAB CO LTD
Publication Date
2007-01-03
Estimated Expiration
Not applicable · inactive patent

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Abstract

As a wiring becomes thicker, discontinuity of an insulating film covering the wiring has become a problem. It is difficult to form a wiring with width thin enough for a thin film transistor used for a current high definition display device. As a wiring is made thinner, signal delay due to wiring resistance has become a problem. In view of the above problems, the invention provides a structure in which a conductive film is formed in a hole of an insulating film, and the surfaces of the conductive film and the insulating film are flat. As a result, discontinuity of thin films covering a conductive film and an insulating film can be prevented. A wiring can be made thinner by controlling the width of the hole. Further, a wiring can be made thicker by controlling the depth of the hole.
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Description

technical field

[0001] The present invention relates to methods of fabricating wiring, thin film transistors, and display devices, each employing a method whereby patterns can be selectively formed. More specifically, the present invention relates to a display device having components such as transistors formed on a large glass substrate using a droplet discharge method typically an inkjet method as a method capable of selectively forming patterns. The active element, the invention also relates to a manufacturing method of a display device. Furthermore, the present invention relates to a wiring, a thin film transistor, and a display device formed by a method capable of selectively forming patterns. Background technique

[0002] By patterning various thin films using an exposure process using a photomask and a manufacturing technique of a semiconductor integrated circuit, so-called thin film transistors (hereinafter also referred to as "TFTs") on a glass substrate have been ...

Claims

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