Two-rotor statically stable electromagnetic suspension micro-rotary gyro

An electrostatically stable and electromagnetic levitation technology, applied to rotating gyroscopes, electric components, asynchronous induction motors, etc., can solve problems such as loss of rotation, being thrown out, and eccentricity of the micro-rotor speed, so as to increase the impact resistance and improve Lateral stiffness, the effect of increasing the lateral anti-interference ability

Inactive Publication Date: 2007-02-28
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

One of the reasons why the speed of the micro-rotor cannot be further increased is that there is an eccentricity when the micro-rotor rotates. With the increase of the speed, the centrifugal force of the micro-rotor increases, and finally the micro-rotor is thrown out under the action of the centrifugal force and loses stable rotation.
This is the inherent defect of the electromagnetic levitation micro-rotating gyroscope in the self-stabilizing state

Method used

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  • Two-rotor statically stable electromagnetic suspension micro-rotary gyro
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  • Two-rotor statically stable electromagnetic suspension micro-rotary gyro

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Embodiment Construction

[0018] As shown in FIG. 1 , the present invention includes: an upper substrate 1 , an upper stator 2 , a micro-rotor 3 , a lower stator 4 , a sealing ring 5 and a lower substrate 6 . The upper stator 2 is fabricated on the upper base body 1 by a microfabrication method, and forms a fixed connection with the upper base body 1 . The lower stator 4 is manufactured on the lower base body 6 by using a micro-machining method, and forms a fixed connection with the lower base body 6 . Except that the anti-adhesion post 12 is made on the lower stator 4, other structures of the lower stator 4 are exactly the same as the upper stator 2. A sealing ring 5 is fabricated on the outer edge of the lower base body 6 by using a microfabrication method, and forms a fixed connection with the lower base body 6 . Using a bonding process, the sealing ring 5 and the upper base 1 form a fixed connection. The micro-rotor 3 is stably suspended in the closed cavity formed by the upper base 1 , the lower...

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Abstract

The invention relates to a dual-stator static stabilize electromagnetic suspension micro-rotation gyroscope, wherein it comprises: upper base, upper stator, micro rotator, lower stator, lower base, and sealing ring; said micro rotor is a conductive ring; the upper stator is above the upper base to be fixed with the upper base; the lower stator is above the lower base to be fixed with lower base; the edge of lower base is arranged with sealing ring, to be fixed with lower base; the sealing ring and upper base via bonding technique are fixed; the upper and lower stators, from outer to inner, are arranged with stabilize suspension outer coil, sensing electrode, connecting wire stabilize suspension inner coil, and rotation coil; the center of lower stator is arranged with anti-adhesive post. The invention leads in the static electrode, to improve the side rigidity of suspended micro rotator, and the anti-impact ability of micro gyroscope system.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electro-mechanical systems, in particular to a dual-stator electrostatically stable electromagnetic levitation micro-rotating top. Background technique [0002] In the past two decades, many kinds of micro-vibration gyroscopes have been processed by using silicon surface micro-processing technology or bulk micro-processing technology at home and abroad, but it is difficult for micro-vibration gyroscopes to achieve the high precision of traditional gyroscopes due to various reasons. In the 1990s, Shearwood and others proposed an electromagnetic levitation micro-rotating gyroscope. The electromagnetic levitation micro-rotating gyroscope is composed of planar coils, induction electrodes and micro-rotors. The planar coils are divided into suspension coils according to their functions. , rotating coil and stable coil. The electromagnetic levitation micro-rotating gyroscope is suspended and r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/24G01C21/16G01P15/125H02K7/09H02K17/16H02K57/00H02N15/02
Inventor 吴校生陈文元
Owner SHANGHAI JIAO TONG UNIV
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