Substrate reception container, substrate reception body, and substrate conveyance device
A technology for storing containers and conveying devices, which can be applied to containers, rigid containers, transportation and packaging, etc., can solve the problems of glass substrate end collapse and injury, and achieve the effects of avoiding injury and damage, suppressing deformation, and having good impact resistance.
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[0056] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
[0057] 1 is a schematic cross-sectional view showing a substrate storage body according to a first embodiment in which stacked substrates are stored in the substrate storage container of the present invention. FIG. 2 is a schematic perspective view of a part of the substrate storage body in FIG. 1 , and FIG. 3 It is a schematic side view showing the state where the substrate stack is placed on the pallet, and FIG. 4 is a schematic side view showing the state where the substrate stack is placed on the pallet. The substrate storage body 1 accommodates a stacked body 5 formed by stacking a plurality of substrates in a substrate storage container (hereinafter, simply referred to as a storage container) 10 . Hereinafter, each part will be described in detail.
[0058] In this embodiment, the substrate 3 to be accommodated is flat glass, glass substrates and proces...
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