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System and method for generating beams of light using an anisotropic acousto-optic modulator

An acousto-optic modulator, anisotropic technology, applied in lasers, phonon exciters, nonlinear optics, etc., can solve problems such as light abandonment, occupying a large space, and inability to fully obtain AOM frequency shifters

Inactive Publication Date: 2007-05-09
AGILENT TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although this approach reduces the component count compared to the aforementioned dual AOM solution, it has its own serious problems
The main disadvantages include: a significant portion of the light from the source is discarded (even with a laser with a single polarization output); a large amount of space is required to complete this solution; and this solution does not fully capture the side benefit of the isolation provided by the AOM frequency shifter for the laser , since it only isolates the feedback for one polarization state
Thus reflections of the beam upstream back into the laser can cause problems with wavelength stability and can cause the laser to lose lock

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  • System and method for generating beams of light using an anisotropic acousto-optic modulator
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  • System and method for generating beams of light using an anisotropic acousto-optic modulator

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Embodiment Construction

[0019] The following detailed description refers to the accompanying drawings, which form a part hereof, and which illustrate specific and exemplary embodiments in accordance with the invention. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the claims. Therefore, the following detailed description is not intended to be limiting, and the scope of the invention is defined by the claims.

[0020] FIG. 1 is a schematic diagram illustrating a system 100A for generating two frequency-shifted beams with orthogonal linear polarization states in accordance with a first embodiment of the present invention. System 100A includes a laser source (laser) 102 and an acousto-optic modulator (AOM) 108 . A laser 102 is used as a source of a heterodyne beam 104 having two different frequency components (f1 and f2) of orthogonal linear polarizations (eg, horizontal and vertical). Beams or beam compo...

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Abstract

A light source system includes a beam source generating a first input beam of light with first and second beam components. The first component has a first linear polarization and a first frequency. The second component has a second linear polarization and a second frequency. The first and second linear polarizations are orthogonal. An anisotropic acousto-optic modulator (AOM) is positioned to receive the first input beam. The AOM is operable to change the polarization and frequency of the first and the second beam components in response to a control signal, and thereby generate first and second output beams corresponding to the first and second components, respectively.

Description

technical field [0001] The present invention relates to systems and methods for generating light beams using anisotropic acousto-optic modulators. Background technique [0002] Measurement optics in polarization-based or multiplexed heterodyne interferometers, such as those used for precision measurements in semiconductor device fabrication equipment, typically use beams comprising orthogonally polarized components of different frequencies. Dual-frequency / dual-polarization light sources are used in heterodyne interferometry. The frequency difference between the two orthogonally polarized beam components is important because it can limit how fast an object is moving and still be able to accurately measure distance with this type of measurement system. Zeeman (Zeeman) split HeNe laser can provide orthogonally polarized light components, but the difference frequency is limited to a maximum of about 8MHz. Dual-mode frequency-stabilized HeNe lasers can also provide two orthogon...

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Application Information

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IPC IPC(8): G02F1/11G02F1/125G02F1/35H01S3/00
CPCG02F2201/16G01B9/02003G02F1/332G01B2290/70
Inventor 卡罗尔·J·考尔维勒朱淼凯丽·D·巴戈维尔
Owner AGILENT TECH INC