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Low-frequency send-receive dual-purpose sensor used in scan probe acoustics micro-imaging

A technology of microscopic imaging and scanning probe, applied in scanning probe microscopy, scanning probe technology, scientific instruments, etc., can solve the problems of high driving voltage, troublesome signal processing, poor image quality, etc., to simplify hardware requirements, widening the field of practical use, and easy-to-achieve effects

Inactive Publication Date: 2007-05-16
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The working frequency of the sensors used in the acoustic imaging of probes is hundreds of kilohertz, or even above 1MHz. Not only the driving voltage is high, the acoustic vibration amplitude is small, but also it brings a lot of trouble to the signal processing, and the image quality is poor.
[0003] After retrieval, there is no report in this area at home and abroad

Method used

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  • Low-frequency send-receive dual-purpose sensor used in scan probe acoustics micro-imaging
  • Low-frequency send-receive dual-purpose sensor used in scan probe acoustics micro-imaging

Examples

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Embodiment 2

[0022] Example 2: In the same manner as in Example 1, the ferroelectric domain structure of the deleted sample PMN-PT ferroelectric single crystal was imaged using the acoustic mode of the low-frequency scanning probe. Since the contrast of SPAM imaging mainly comes from the inhomogeneity of the elastic modulus of the micro-region of the material, and from the perspective of the micro-structure of the material, there will be changes in the hardness between the domain structures of different polarization orientations, so in the elastic structure only by different When it is caused by the domain structure of the polarization orientation, SPAM can indirectly reflect the ferroelectric domain structure.

Embodiment 3

[0023] Example 3: Imaging of an integrated circuit IC using a low frequency scanning probe acoustic mode. Its image clearly shows the fine structure between the metal lines.

[0024] Figure 3 is the scanning probe acoustic imaging mode on the PMN-PT single crystal, the topography image and the scanning probe acoustic image obtained at the same time under the condition that the excitation power is 3.4V×6.42kHz. Figure 3a is the topography image of the polished sample, which has no other information except the scratches left during polishing. On the other hand, the scanning probe acoustic image (Fig. 3b) shows inhomogeneous regions of light and dark contrast, reflecting the ferroelectric domain structure with different spontaneous polarization orientations.

[0025] In order to illustrate the practicability of the invention, in addition to selecting polycrystalline material and single crystal material as implementation examples, we also selected integrated circuit IC as an impl...

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Abstract

This invention relates to one sensor for scanning detect sound microscope imaging with low frequency, high accuracy or receiving and sending, wherein, the said sensor is composed of accurate machine, energy sensitive element and relative mechanic structure; the said sensor work frequency range is 2-30kHz lower than regular degrees based on scanning detecting sound microscope with image system resolution rate at 5nm.

Description

technical field [0001] The invention relates to a low-frequency, dual-purpose high-sensitivity sensor for transmitting and receiving for scanning probe acoustic microscopic imaging. The sensor is a core component in the scanning probe acoustic microscopic imaging system and belongs to the field of functional materials and devices. Background technique [0002] Scanning Probe Microscope (SPM) has been widely used in many high-tech fields since its appearance. Scanning Probe Acoustic Microscope (Scanning Probe Acoustic Microscope, SPAM) is a new type of non-destructive microanalysis instrument developed on the scanning probe microscope, which combines modern scanning probe technology with acoustic technology, piezoelectric sensing technology, weak The signal detection technology is integrated. In addition to the imaging function of the general scanning probe microscope, it can also conduct micro-area electrical and elastic performance research, internal defect detection and mi...

Claims

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Application Information

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IPC IPC(8): G01N13/10G01N29/24G01Q60/00
Inventor 殷庆瑞余寒峰惠森兴赵坤宇
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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