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Crystal growing device and process

A crystal growth and crystal technology, applied in the field of crystal growth, can solve problems affecting crystal quality, crystal extrusion cracking, cooling shrinkage inconsistency, etc., to achieve the effects of improving quality, avoiding cracking, and shortening the production cycle

Active Publication Date: 2007-06-27
GRINM GUOJINGHUI NEW MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

During the crystal cooling process of this growth method, the cooling shrinkage ratio of the crucible and the crystal is inconsistent, and the crystal in the crucible is easily squeezed and cracked by the crucible, which seriously affects the quality of the crystal.

Method used

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  • Crystal growing device and process

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Embodiment Construction

[0016] See Figure 1: a device for crystal growth, which mainly includes a cylindrical resistance heater 2; the crucible 4 is located in the center of the cylindrical resistance heater, and there is a tubular heat exchanger that can be raised and lowered above it , The lower end of the tubular heat exchanger has a chuck on which the seed crystal is mounted. A gas delivery pipe 7 leading to the inner bottom of the tubular heat exchanger for delivering helium is arranged in the tubular heat exchanger 1 . The outside of the tubular resistance heater is provided with an insulating layer 3 .

[0017] The resistance heater 2 can be made of graphite material into a cylindrical shape with good symmetry, and the crucible 4 is in the center of the cylindrical resistance heater 2; the function of the heat exchanger 1 is to prevent the seed crystal 5 from being melted and to control the cooling of the seed crystal The speed can realize the control of the crystal growth speed.

[0018] A ...

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Abstract

The crystal growing set includes one crucible, one elevating tubular heat exchanger over the melt inside the crucible, one chuck holding seed crystal in the lower end of the heat exchanger and one helium pipe inside the tubular heat exchanger for feeding helium to the bottom of the heat exchanger. The crystal growing process includes the following steps: heating with the resistance heater to smelt the material inside the crucible; smelting and connecting the seed crystal via controlling the heating power and the helium flow rate; increasing helium flow rate to cool the seed crystal and control crystal growth speed; lifting the heat exchanger and lowering the heating power for pushing the crystal growth interface downwards; and separating the grown crystal from the melt inside the crucible and lowering the temperature to room temperature gradually to complete crystal growth. The present invention has shortened crystal cooling time and production period.

Description

technical field [0001] The invention relates to the technical field of crystal growth, and belongs to a device and method for growing melt crystals in a thermal field. Background technique [0002] The existing heat exchange method crystal growth device (shown in Fig. 2), its device is made of crucible 4, cylindrical heater 2, heat exchanger 1 and insulation layer 3, and seed crystal 1 is positioned at the bottom center of crucible 4, A tubular heat exchanger 1 in close contact with the bottom of the crucible is arranged at the center of the bottom outside the crucible, and a gas delivery pipe 7 leading to the inner top of the tubular heat exchanger to deliver helium is arranged in the tubular heat exchanger. When the crystal is growing, the heater 2 is used to heat up and heat, and the solid raw material placed in the central crucible of the heater is melted into a melt 6. At the same time, the cooling amount of helium in the heat exchanger and the power of the heater are c...

Claims

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Application Information

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IPC IPC(8): C30B17/00
Inventor 黎建明苏小平杨海霍承松李楠那木杨鹏
Owner GRINM GUOJINGHUI NEW MATERIALS CO LTD
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