Multi-terminal chalcogenide switching devices
A chalcogenide and terminal technology, which is applied in superconductivity devices, volume negative resistance effect devices, semiconductor/solid-state device manufacturing, etc., can solve the problems of cost impurity and process pollution increase, computer limitation and heavy load, etc.
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example 1
[0041] An example of a device structure according to the present invention is shown in FIG. 3 . Figure 3 shows a cross-sectional view of a three-terminal device structure. The three terminals are labeled T(1), T(2), and T(3). A plurality of these devices are formed on a 6" silicon wafer. The devices and layers on the wafer are formed using conventional sputtering, chemical vapor deposition, etching, and lithographic techniques. The structure includes a silicon wafer substrate 10, thermally oxidized layer 20, a bottom electrode 30 comprising a conductive layer 40 and a carbon barrier layer 50 formed of TiW or a combination of Ti and TiN, SiO X / SiN XThe isolation region 60 , the control electrode 70 formed of TiW, the chalcogenide material 80 , the upper electrode 90 including the carbon barrier layer 100 and the conductive layer 110 including Ti and TiN, and the Al layer 120 . In this example, the chalcogenide material 80 is Ge 2 Te 2 Sb 5 , and is labeled GST in Figure ...
example 2
[0043] In this example, several test results for the characteristics of the three-terminal device structure shown in FIG. 3 are described. Several different devices randomly selected from among the devices formed on the wafer were tested. Figure 4 summarizes the results of some tests performed by the inventors. Figure 4 shows the first quadrant of the I-V diagram for a three-terminal device of the present invention. The current I corresponds to the current passed between the load (top) and reference (bottom) electrodes of the structure, and the voltage V corresponds to the voltage applied between the load and reference electrodes. The I-V relationship between the load and the reference electrode was determined for several different control voltages applied to the control electrode. In the test, a control voltage of constant magnitude was applied to the control terminals, and the current between the load and the reference electrode was measured as a function of the voltage ap...
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