Electronic parts built-in substrate and method of manufacturing the same
a technology of built-in substrates and electronic parts, which is applied in the direction of solid-state devices, printed circuit non-printed electric components association, and semiconductor/solid-state device details, etc. it can solve the problems of reducing the reliability of the electric bonding applied to flip-chip bonding the upper semiconductor chip to the wiring, prone to defocus in photolithography, and difficult to form wiring patterns on the insulating film with good precision. , to achieve the effect of reducing production costs and high crack
Inactive Publication Date: 2005-03-31
SHINKO ELECTRIC IND CO LTD
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- Application Information
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Benefits of technology
[0014] In contrast, in the present invention, the first and second semiconductor chips are flip-chip connected in sequence to the wiring substrates manufactured by the normal manufacturing method such that the first semiconductor chip is installed in the space under the second semiconductor chip, and then the filling insulating body (underfill resin) is filled at a time in the clearances under the first and second semiconductor chips. Therefore, the first semiconductor chip is easily buried in the filling insulating body (underfill resin) having the high crack resistance and then packaged.
[0015] As a result, the manufacturing steps become very simple rather than the related arts 1 and 2 described later. Thus, reduction in a production cost can be attained and also the reliability such as the crack resistance of the insulating film in which the electronic parts is buried, etc. can be improved.
[0016] Also, unlike the related arts 1 and 2 described later, there is no necessity to mate the film thickness of the insulating film of the wiring substrate with the thickness of the electronic parts. Therefore, since the film thickness of the insulating film can be adjusted appropriately to meet the characteristics of the wiring substrate, an overall thickness of the electronic parts built-in substrate can be thinned.
Problems solved by technology
If the level difference is caused in the insulating film on the semiconductor chip, defocus is liable to occur in the photolithography applied to form the wiring patterns on the insulating film.
Thus, it becomes difficult to form the wiring patterns on the insulating film with good precision.
Further, since a level difference is also caused in the wiring patterns formed on the insulating film, there is a possibility of lowering the reliability of the electric bonding applied to flip-chip bond the upper semiconductor chip to the wiring patterns.
Method used
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embodiment
[0042] (Embodiment)
[0043]FIGS. 3A to 3H are sectional views showing a method of manufacturing an electronic parts built-in substrate according to an embodiment of the present invention in order. As shown in FIG. 3A, first a base substrate 10 is prepared to manufacture a build-up wiring substrate. This base substrate 10 is made of insulating material such as glass epoxy resin, or the like. Through holes 10a are provided in the base substrate 10, then a through-hole plating layer 10b connected to a first wiring pattern 12 on the base substrate 10 respectively is formed on inner surfaces of the through holes 10a, and then the openings are buried with a resin body 10c.
[0044] Then, as shown in FIG. 3B, a first interlayer insulating film 14 is formed on the first wiring patterns 12. As the first interlayer insulating film 14, a resin such as epoxy resin, polyimide resin, polyphenylene ether resin, or the like may be employed. As an example of the forming method, a resin film is formed by...
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An electronic parts built-in substrate of the present invention includes a wiring substrate having connecting pads, a first electronic parts a bump of which is flip-chip connected to the connecting pad, a second electronic parts having a larger area than an area of the first electronic parts a bump of which is flip-chip connected to the connecting pad arranged on an outside of a periphery of the first electronic parts and which is packaged at a predetermined interval over the first electronic parts, and a filling insulating body filled in a clearance between the first electronic parts and the wiring substrate and clearances between the second electronic parts and the first electronic parts and the wiring substrate, wherein the first electronic parts is buried in the filling insulating body.
Description
BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to an electronic parts built-in substrate and, more particularly, an electronic parts built-in substrate having a structure in which electronic parts are packaged in a multi-layered fashion in a state that these electronic parts are buried in insulating films and a method of manufacturing the same. [0003] 2. Description of the Prior Art [0004] The development of the LSI technology serving as a key technology to implement the multimedia devices is proceeding steadily to a higher speed and a larger capacity in data transmission. With this development, a higher density in the packaging technology serving as the interface between LSI and the electronic device is advanced. [0005] In reply to the request for the higher density, the electronic parts built-in substrate having the structure in which electronic parts are packaged on the wiring substrate in a multi-layered fashion in a state that ...
Claims
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Patent Timeline
Login to View More IPC IPC(8): H05K1/18H01L21/56H01L25/065H01L25/07H01L25/18H05K3/46
CPCH01L21/563H01L24/24H01L2224/73204H01L2224/32225H01L2224/16225H01L2924/014H01L2924/01006H01L2924/01005H01L2924/30105H01L2924/19041H01L2924/1517H01L2924/15153H01L24/82H01L25/0657H01L2224/24227H01L2224/73203H01L2224/92H01L2225/06517H01L2225/06555H01L2225/06582H01L2924/01029H01L2924/01033H01L2924/01078H01L2924/01079H01L2924/01082H01L2224/83H01L2224/82H01L2924/00H01L2224/04105H01L2224/12105H01L2224/16238H01L2224/73267H01L2224/92244H01L2924/12042H05K1/18H05K3/46H01L2224/05573
InventorSUNOHARA, MASAHIRO
OwnerSHINKO ELECTRIC IND CO LTD