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Active vibration reduction

a technology of active vibration and reduction, applied in the field of pump systems, can solve the problems of unwanted vibration coming from the backing pump connected to the tmp, and achieve the effect of less vibration in the chamber

Inactive Publication Date: 2005-08-25
EDWARDS VACUUM INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0009] An active vibration reduction system is disclosed that uses a magnetic bearing to produce a vibration to cancel an unwanted vibration. Unwanted vibration may come from a backing pump connected to a TMP, especially where the backing pump and the TMP are close together. The unwanted vibration propagates through the TMP to a host system. Vibration may be sensed where the TMP is attached to the host. For example, a sensor placed on the inlet

Problems solved by technology

Unwanted vibration may come from a backing pump connected to a TMP, especially where the backing pump and the TMP are close together.

Method used

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Examples

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Embodiment Construction

[0014]FIG. 2 shows an example of a pumped system 200 that uses the present invention. TMP 210 is directly connected to a host 220 on one side and connected to a backing pump 230 on the other side. In other embodiments, lines may connect these components. The backing pump 230 is connected to an exhaust line 240 that is connected to a scrubber (not shown) that may be located in a number of different positions, for example, outside the fab 250, in the sub-Fab or within the Fab environment next to the pump 230. The TMP 210, host 220 and backing pump 230 are all located in the fab 250 in this example.

[0015] Gas is pumped from the host 220 by the TMP 210. The host 220 may be any apparatus that is pumped by a pumping system. Examples include cluster tools used in semiconductor processing such as, but not limited to, chemical vapor deposition (CVD), physical vapor deposition (PVD) or etch. The TMP 210 is typically mounted to a single chamber of a cluster tool and is dedicated to that chamb...

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Abstract

In a system that includes an active magnetic bearing, a magnetic bearing may induce vibration in anti-phase with an unwanted vibration so that the total vibration in the system is reduced. A magnetic bearing in one pump may be used to cancel vibration from another pump in this way.

Description

FIELD OF THE INVENTION [0001] This invention relates generally to pump systems, in particular vacuum pump systems and ways to reduce the vibrations in such systems. BACKGROUND [0002] Pumps are widely used in industrial applications. Vacuum pumps are used in many applications in industries such as the semiconductor industry. For many processes it is necessary to create a vacuum in a process chamber. For example, chemical vapor deposition, sputtering and etching are all carried out in a vacuum environment and so equipment for these processes is generally connected to a vacuum pump or a system of vacuum pumps. [0003] Semiconductor processing normally takes place in an extremely clean, controlled environment. Small particles of foreign material can damage semiconductor devices so great care is taken to eliminate any such particles from the manufacturing area. Small changes in the environment may affect sensitive processes. To overcome these problems, a “fab” is created in which the air ...

Claims

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Application Information

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IPC IPC(8): F04B39/00F04B53/00F04D19/04F04D29/056F04D25/16F04D29/048F04D29/66F16C32/04F16C39/06F16F15/02
CPCF04B39/0027F04B53/001F16C2360/45F16C32/0444F16F15/02F04D29/668F04D19/048
Inventor HUNTLEY, GRAEME
Owner EDWARDS VACUUM INC