Scanning probe microscope and method

a scanning probe and microscope technology, applied in the field of scanning probe microscopes, can solve the problems of affecting the speed at which force signals drift, affecting the accuracy of scanning results, and damage to soft samples, etc., and achieve the effect of reducing the shear force applied

Inactive Publication Date: 2006-02-09
WARREN ODEN L +2
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  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0021] The present invention provides advantages in that soft samples can be imaged on a microscopic lev...

Problems solved by technology

Unfortunately, problems exist in that soft samples are often damaged by the plowing action of the tip on the sample as the sample is rastered by the piezoelectric scanner in the x-y plane.
Feedback attempts to inhibit the common plate of the displacement sensor from actually deflecting which leads to rapid restabilization of the displacement senso...

Method used

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  • Scanning probe microscope and method
  • Scanning probe microscope and method
  • Scanning probe microscope and method

Examples

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Embodiment Construction

[0035] Referring now to FIG. 1, an interfacial force microscope (IFM) under force-feedback control and configured to operate in an intermittent contact mode to generate microscopic images of a sample under observation in accordance with the present invention is shown and is generally indicated to by reference numeral 20. As can be seen, the IFM 20 includes a differential-capacitance displacement (DCD) sensor 22 to contact intermittently the sample to be imaged. A controller 24 is coupled to the DCD sensor 22 as well as to a piezoelectric scanner 26 positioned adjacent the DCD sensor 22 and supporting the sample. The piezoelectric scanner 26 is responsive to the controller 24 to move the sample in a vertical direction to alter the sensor-sample separation. The piezoelectric scanner 26 is also actuable to move the sample laterally in an x-y plane to raster the DCD sensor 22 over the sample at a rate equal to about 2 to 3 μm / s. An imager 27 such as a NanoScope IIIa MultiMode manufactur...

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Abstract

An interfacial force microscope includes a differential-capacitance displacement sensor having a tip mounted on an oscillating member. The sensor generates displacement signals in response to oscillations of the member. A scanner is adjacent the sensor and supports a sample to be imaged. The scanner is actuable to move the sample relative to the sensor to bring the tip into intermittent contact with said sample as the member oscillates. A controller is in communication with the sensor and the scanner. The controller includes a sensor feedback circuit receiving the displacement signals and an AC setpoint signal. The AC setpoint signal has a frequency generally equal to the frequency at the peak of the displacement versus frequency curve of the sensor. The output of the sensor feedback circuit is applied to the sensor to oscillate the member. The controller also provides output to the scanner in response to the displacement signals to control the separation distance between the sensor and the sample.

Description

FIELD OF THE INVENTION [0001] The present invention relates generally to imaging and in particular to a method and apparatus for intermittent contact imaging. BACKGROUND OF THE INVENTION [0002] Atomic-force microscopy has become widely used to image surfaces of samples on a microscopic scale. Its popularity to a large extent is due to the fact that an atomic-force microscope (AFM) measures the force or force gradient between a sharp tip disposed on a cantilever and a sample surface at a picoNewton (pN) level as opposed to the tunneling current measured with a scanning tunneling microscope (STM). This of course allows the AFM to image insulating as well as conducting samples. [0003] AFMs can be operated in either contact or intermittent contact modes. When operating in a contact mode, the deflection of a weak cantilever is kept constant while servoing the vertical extension of a piezoelectric scanner supporting the sample being imaged. The piezoelectric scanner is also rastered in an...

Claims

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Application Information

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IPC IPC(8): H01J40/14G01B7/34G01Q10/06G01Q20/00G01Q60/34
CPCB82Y35/00G01Q10/065G01Q60/34
Inventor WARREN, ODEN L.NORTON, PETER R.GRAHAM, JOHN F.
Owner WARREN ODEN L
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