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Optical element, process for producing optical element, coating equipment, and coating method

Inactive Publication Date: 2006-11-09
KURODA TOSHIHIRO +3
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0007] It is an object of the present invention to provide an optical element having an optical-waveguide structure layer made of a resin, and an optical element having superior adherence between the substrate and the optical-waveguide structure layer.

Problems solved by technology

These bonding layers have a problem that any too thin layer can not exhibit the action to improve adherence and on the other hand any too thick layer makes the bonding layer itself brittle.
Hence, depending on the properties of the bonding layer material solution, a problem may arise such that the film thickness tends to have a large distribution.
Such large distribution of film thickness tends to cause a problem that the action to improve adherence can not be attained at the part having too small film thickness and the bonding layer is brittle at the part having too large film thickness.

Method used

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  • Optical element, process for producing optical element, coating equipment, and coating method
  • Optical element, process for producing optical element, coating equipment, and coating method
  • Optical element, process for producing optical element, coating equipment, and coating method

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first embodiment

[0029] First, the structure of an optical element 100 according to a first embodiment of the present invention is described with reference to FIGS. 1 to 4. The optical element 100 has a silicon single-crystal substrate 1, and provided thereon a region in which an optical-waveguide multi-layer member 10 has been mounted on the silicon single-crystal substrate 1, a region 20 in which a V-groove 21 has been disposed, and a region 30 in which an electrode 7 on which a light-emitting element or a light-receiving element is to be mounted. The optical-waveguide multi-layer member 10 embraces an optical waveguide 4, and the V-groove 21 is a groove to which an optical fiber is to be mounted. As to the V-groove 21, its depth and width are so designed that it stands in alignment with the optical waveguide 4 when an optical fiber with a predetermined diameter is mounted. Hence, e.g., the light-emitting element is mounted on the electrode 7 and the optical fiber is mounted to the V-groove 21, wh...

second embodiment

[0061] Next, a process for producing optical elements 100 according to Second Embodiment of the present invention is described.

[0062] The optical elements 100 according to the second embodiment are each structured to have the shape and layer structure shown in FIGS. 1 to 4 like those in First Embodiment, but differ from those in First Embodiment in that an organozirconium compound film is used as the first coupler layer 22. The method of spin coating in forming the first coupler layer 22 also differs from that in First Embodiment. Further, in the second embodiment, in the step of removing first coupler layers 22 and second coupler layers 23 from regions 20 and 30, a positive resist film is used, and exposure and development methods are devised so that the resist layer and the second coupler layers 23 can completely be removed.

[0063] In this Embodiment, as the organozirconium compound constituting the first coupler layer 22, various compounds may be used as described later. Here, a...

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PUM

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Abstract

A method of producing optical elements using a substrate having a recess, which is capable of easily removing a film in the recess, and optical elements formed. The optical element comprises a substrate 1, an optical waveguide structure layer 10 of resin disposed in a part of the region on the substrate 1, and a recess 21 formed in the region where the optical waveguide structure layer 10 is not disposed. The optical waveguide structure layer 10 includes an optical waveguide 4 and a clad layer. A coupler layer is disposed between the substrate 1 and the optical waveguide structure layer 10, and the film thickness distribution range of the coupler layer in the region below the optical waveguide 4 is such that the minimum film thickness is not more than 30 angstroms and the maximum film thickness is not less than 20 angstroms.

Description

[0001] This application is a Divisional application of application Ser. No. 10 / 479,150, filed Apr. 30, 2004, the contents of which are incorporated herein by reference in their entirety. Ser. No. 10 / 479,150 is a National Stage application, filed under 35 U.S.C. §371, of International Application No. PCT / JP02 / 05289, filed May 30, 2002.TECHNICAL FIELD [0002] This invention relates to a process for producing an optical element made of a resin. BACKGROUND ART [0003] Polyimide type resins attract notice as materials with use of which optical elements such as optical waveguides having good optical characteristics can be produced by a simple production process. Polyimide type resins have a high glass transition temperature (Tg) and a superior heat resistance, and hence optical elements produced are expected to have a long-term reliability, and further, even though they are made of resins, can withstand soldering. In particular, a polyimide type resin containing fluorine has characteristic ...

Claims

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Application Information

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IPC IPC(8): G02B6/00G02B6/12G02B6/132G02B6/138G02B6/30G02B6/42
CPCG02B6/132G02B6/138G02B2006/121G02B6/4202G02B6/4204G02B6/30G02B6/13
Inventor KURODA, TOSHIHIROKONDOU, MADOKAYOSHINO, ATSUSHIMIYADERA, NOBUO
Owner KURODA TOSHIHIRO