Solid-state imaging device and electronic apparatus

Inactive Publication Date: 2010-10-21
SONY CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0009]It is therefore desirable to provide a solid-state imaging device and an electronic apparatus in which even when color separation is achieved using a multilayer film, the multilayer film does not have a stepped shape but has a uniform thickness for each pixel, thus providing good optical characteristics.
[0012]In the embodiment of the present invention, even when a multilayer film in which a plurality of layers made of different materials are laminated is used as a color filter for achieving color separation, the multilayer film has a uniform thickness and will not have a stepped shape in each pixel. Therefore, it is possible to prevent the amount of transmitted light from decreasing due to a bulge of the step portions. That is to say, according to the embodiment of the present invention, it is possible to obtain good optical characteristics for the multilayer film used as a color filter.

Problems solved by technology

For this reason, there is concern that the amount of light transmitting through the inorganic multilayer film may decrease due to a bulge of the step portions.

Method used

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  • Solid-state imaging device and electronic apparatus
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  • Solid-state imaging device and electronic apparatus

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Experimental program
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first embodiment

2. First Embodiment

[0037]Next, a main characteristic part of the solid-state imaging device according to an embodiment of the present invention will be described.

[0038]In this section, the OCCF 4 will be described in detail as the main characteristic part of the solid-state imaging device.

Exemplary Configuration

[0039]FIG. 3 is a sectional side view showing an exemplary specific configuration of the OCCF according to the embodiment of the present invention.

[0040]The OCCF 4 shown in FIG. 3 is formed of a multilayer film in which a plurality of layers made of materials having different refractive indices is laminated. As the materials having different refractive indices, inorganic materials can be used. This is because inorganic materials are advantageous over organic materials in view of cost, durability, degree of freedom in process choice, and the like. Specifically, examples of the plurality of inorganic materials having different refractive indices include silicon dioxide (SiO2) h...

second embodiment

3. Second Embodiment

[0078]Next, another exemplary configuration of a main part of the solid-state imaging device according to an embodiment of the present invention will be described.

[0079]In this section, only the difference from the first embodiment will be described.

[0080]FIG. 11 is a sectional side view showing another exemplary specific configuration of the OCCF according to the embodiment of the present invention.

[0081]The OCCF 4 shown in FIG. 11 has the defect layer 11 which is different from that of the first embodiment described above.

[0082]In the defect layer 11 according to the present embodiment, the ratio of areas of the respective portions 11a and 11b in the regular pattern of the TiO2 portions 11a and the SiO2 portions 11b constituting the defect layer 11 is different at respective positions which correspond to the plurality of light-receiving elements 1 arranged in the surface. That is to say, the area ratio (duty ratio) of the TiO2 portions 11a and the SiO2 portions...

third embodiment

4. Third Embodiment

[0092]Next, another exemplary configuration of a main part of the solid-state imaging device according to an embodiment of the present invention will be described.

[0093]In this section, only the difference from the first or second embodiment will be described.

[0094]FIG. 13 is a sectional side view showing another exemplary specific configuration of the OCCF according to the embodiment of the present invention.

[0095]The OCCF 4 shown in FIG. 13 has the defect layer 11 which is different from that of the first or second embodiment.

[0096]In the defect layer 11 according to the present embodiment, the ratio of areas of the TiO2 portions 11a and the SiO2 portions 11b constituting the defect layer 11 is different at different positions which are respectively located closer to the central portion and the periphery of a region corresponding to one light-receiving element 1. That is to say, the area ratio (duty ratio) of the TiO2 portions 11a and the SiO2 portions 11b which...

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Abstract

A solid-state imaging device includes: a light-receiving element; and a multilayer film which is disposed on a side of a light-receiving surface of the light-receiving element and is formed by laminating a plurality of layers made of materials having different refractive indices, in which a defect layer is included in at least one of the laminated layers, wherein in the defect layer, a plurality of kinds of materials having different refractive indices coexist in a surface parallel to the light-receiving surface.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a solid-state imaging device that is used as an imaging device and an electronic apparatus having the solid-state imaging device mounted thereon.[0003]2. Description of the Related Art[0004]In solid-state imaging devices represented by CMOS (Complementary Metal Oxide Semiconductor) sensors, organic materials are generally used as the materials of color filters for achieving color separation. This is because organic materials provide a high degree of freedom for absorption spectral characteristic design and make it easy to obtain characteristics close to those desired.[0005]However, the use of organic materials may result in a great increase in cost and even insufficient durability in view of temperature characteristics and light stability. Moreover, the processes that can be used for the upper layers of the organic material layer are limited. For example, it is very difficult to form mic...

Claims

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Application Information

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IPC IPC(8): H04N5/335G02B5/20H01L27/14H04N9/07
CPCH01L31/02165H01L27/14621
InventorYUKAWA, HIROAKI
OwnerSONY CORP