Adjustable Width Cassette for Wafer Film Frames

Abstract

An expandable width cassette for storing and transporting thin planar objects of different widths is provided. The cassette 10 includes two side panels 12 of fixed height opposite and parallel to one another having a series of elongated slots on the inner surface of the side panels for supporting planar objects, a sliding bar assembly 13 on the bottom side of the cassette, and an adjustable length panel 14 on the top side of the cassette. Spring loaded press screws 143 disengaged from locator holes at predefined locations in the top panel allow the cassette width to be altered by pushing or pulling the side panels. A wafer film frame cassette includes a back stop mechanism which further serves to align with a frame notch.

Description

FIELD OF THE INVENTION[0001]The invention relates generally to semiconductor processing equipment, and more particularly to cassettes for wafers on film frames.BACKGROUND OF THE INVENTION[0002]The semiconductor industry, as well as unrelated industries, frequently hold and transfer thin planar objects in cassettes having a series of parallel, spaced apart horizontal slots which receive and hold a single planar object in each slot. Semiconductor wafers are frequently transferred from one processing station to another via cassettes. In some cases, cassettes are sized and shaped to hold film frames or other similar devices upon which a wafer has been mounted for processing and / or transporting.[0003]Cassettes are used within the semiconductor industry primarily in processes which retrieve and process one wafer at a time. In particular, wafer cassettes are often used in conjunction with chemical mechanical planarization machines and in the packaging and assembly operations film frame cas...

AI Technical Summary

Benefits of technology

[0015]An adjustable width cassette for semiconductor wafers includes more narrow slots than a cassette for film frames, and the backstop mechanism is of a material sufficiently compliant to avoid chipping or damage to brittle wafers, such as a molded plastic.

[0017]The expandable width cassette of this invention reduces the amount of storage space required in a manufacturing facility for multiple fixed width cassettes, reduces inventory costs, reduces equipment set-up time, and minimizes errors associated with use of different single width cassettes.

Problems solved by technology

The multiplicity of cassette sizes adds to storage space requirements, as well as inventory cost.

Modifications to automated equipment or equipment interfaces in order to facilitate different wafer and frame sizes result in costly work stoppages and increased cycle time.

Equipment changes, particularly those involving mechanical modifications to interface mechanisms are labor intensive, time consuming, and are subject to set-up errors.

A significant problem associated with multiple cassette sizes requiring equipment set-up changes is the increased probability of improper alignment resulting in damage to costly wafers as a result of frames jamming into each other and sliding across the surface of a wafer.

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