Manufacturing apparatus
a manufacturing apparatus and vacuum technology, applied in the field of manufacturing apparatus, can solve the problems of difficult to design manufacturing processes as automated, difficult to improve productivity, and long time-consuming to set the inside of the film forming chamber to vacuum, etc., to improve the utilization efficiency of el materials, improve throughput, and improve the effect of uniformity
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embodiment 1
[0080]FIG. 1 shows an example of a manufacturing apparatus of a multi-chamber system in which all production processes are automated from a process of forming a first electrode to a sealing process.
[0081]The multi-chamber manufacturing apparatus shown in FIG. 1 includes: gates 100a to 100s; a take-out chamber 119; transfer chambers 104a, 102, 114, and 118; handing-over chambers 105 and 107; a preparation chamber 101; a first film forming chamber 106A; a second film forming chamber 106B; a third film forming chamber 106C; a fourth film forming chamber 106D; other film forming chambers 109a, 109b, 113a, and 113b; process chambers 120a and 120b; setting chambers 126A, 126B, 126C, and 126D for installing an evaporation source; pre-treatment chambers 103a and 103b; a first sealing chamber 116a; a second sealing chamber 116b; a first stock chamber 130a; a second stock chamber 130b; cassette chambers 131a and 131b; a tray putting stage 121; and a washing chamber 122.
[0082]Hereinafter, a de...
embodiment 2
[0118]FIGS. 8A to 8C show a film forming system featured in moving a substrate and an evaporation source relative to each other. FIG. 8A is a sectional view in X direction (a section taken along a dotted line A-A′), FIG. 8B is a sectional view in Y direction (a section taken along a dotted line B-B′) and FIG. 8C is a top view. Further, FIGS. 8A, 8B and 8C show the evaporation system in the midst of evaporation.
[0119]The film forming system shown in FIGS. 8A to 8C is characterized in that in an evaporation system, an evaporation source holder installed with a container filled with an evaporation material is moved by a certain pitch relative to a substrate or the substrate is moved by a certain pitch relative to the evaporation source. Further, it is preferable to move the evaporation source holder by a certain pitch to overlap ends (skirts) of a sublimated evaporation material.
[0120]Although a single or a plurality of the evaporation source holders may be constituted, when the evapor...
embodiment 3
[0138]Here, a detailed description will be given of constitutions of a container for filling an evaporation material and an evaporation source holder at a surrounding thereof in reference to FIGS. 10A and 10B as follows. Further, FIGS. 10A and 10B show a state of an open shutter.
[0139]FIG. 10A shows a sectional view of a surrounding of one container installed at an evaporation source holder 304 illustrated with heating means 303 provided at the evaporation source holder, a power source 307 of the heating means, an evaporation material 302 of the container, a filter 305 provided at inside of the container and a shutter 306 arranged above an opening portion provided at an upper portion of the container. As the heating means 303, resistance heating, high frequency or laser may be used, specifically, an electric coil may be used.
[0140]Further, the evaporation material 302 heated by the heating means 303 is sublimated and the sublimated material 302 rises upwardly from the opening portio...
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Abstract
Description
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Application Information
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