Nozzle plate containing multiple micro-orifices for cascade impactor and method for manufacturing the same

a cascade impactor and micro-orifice technology, applied in the field of aerosol sampling technology, can solve the problems of clogging of particles, measurement errors, damage to the wall thickness of the nozzle plate to define the nozzle diameter, etc., and achieve the effect of avoiding clogging of particles

Inactive Publication Date: 2011-09-01
NAT CHIAO TUNG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0008]It is the main object of the present invention to provide a nozzle plate with multiple micro-orifices for a cascade impactor and a method for manufacturing the same, wherein the micro-orifices of the nozzle plate have a smooth inner surface, avoiding clogging of particles in the nozzle plate.
[0009]It is another object of the present invention to provide a nozzle plate for a cascade impactor and a method for manufacturing the same, wherein the uniform wall thickness and sturdy structure of the micro-orifices facilitate cleaning by an ultrasonic cleaner.

Problems solved by technology

The clogged orifices may cause the cut-point of the impactor to change which leads to measurement errors.
However, an improper cleaning method, such as high intensity ultrasonic cleaning, may damage the nozzle plates whose wall thickness to define the nozzle diameter is very thin.
Besides, this fragile structure prevent the nozzle plates from being cleaned effectively, such as by an ultrasonic cleaner.

Method used

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  • Nozzle plate containing multiple micro-orifices for cascade impactor and method for manufacturing the same
  • Nozzle plate containing multiple micro-orifices for cascade impactor and method for manufacturing the same
  • Nozzle plate containing multiple micro-orifices for cascade impactor and method for manufacturing the same

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Embodiment Construction

[0024]Referring to FIGS. 1-10, a method for the fabrication of a nozzle plate having multiple micro-orifices for the cascade impactor in accordance with the present invention includes the steps of:

[0025](1) depositing a seed layer 22 on a glass substrate 20, as shown in FIG. 1, wherein copper or chromium can be used to deposit the seed layer 22 by a sputtering process, an evaporation process or a chemical vapor deposition (CVD) process; the seed layer 22 has a thickness D2 about 3 μm;

[0026](2) coating the seed layer 22 with a layer of first photoresist 24, radiating UV light through a first mask 26 onto the first photoresist 24, and then developing the first photoresist 24, as shown in FIG. 2, wherein the first mask 26 has a plurality of transparent regions 261 for the passing of the applied UV light; for the sake of brevity, only one transparent region 261 is seen in FIG. 2;

[0027](3) etching the seed layer 22 and removing the first photoresist 24, as shown in FIG. 3, so as to form ...

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Abstract

A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to aerosol sampling technology, and more particularly to a nozzle plate containing multiple micro-orifices for use in a cascade impactor and a method for manufacturing the same.[0003]2. Description of the Related Art[0004]The Micro-Orifice Uniform Deposit Impactor (MOUDI) invented by MSP Corporation has been widely used for size-classified aerosol sampling. Each stage of the MOUDI consists of a nozzle plate with a plurality of nozzles and an impaction plates to collect particles of a specific size range. By decreasing the nozzle diameter and increasing the air jet speed in the nozzle from the top to the bottom stages, the MOUDI is able to collect particles of subsequently smaller size ranges. In a 10 stage MOUDI, the cutoff aerodynamic diameter of the stage 0 to 10 is 18, 10.0, 5.6, 3.2, 1.8, 1.0, 0.56, 0.32, 0.18, 0.1, 0.056 μm, respectively, and there is a final after filter to collect pa...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G01N1/22B05D3/10
CPCG01N1/2208B44C1/227G01N2015/0261G01N15/0255
Inventor TSAI, CHUEN-JINNCHEN, SHENG-CHIEHCHEN, HONG-DAR
Owner NAT CHIAO TUNG UNIV
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