Toroidal Plasma Channel with Varying Cross-Section Areas Along the Channel

Abstract

An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.

Description

CROSS REFERENCE TO RELATED APPLICATION[0001]This application claims the benefit of and priority to U.S. Provisional Patent Application No. 61 / 560,058, filed Nov. 15, 2011, which is owned by the assignee of the instant application and the entire disclosure of which is incorporated herein by reference.FIELD OF THE INVENTION[0002]This invention relates generally to toroidal plasma devices and more particularly to toroidal plasma devices with channels that can have varying sizes to adjust to different plasma sizes.BACKGROUND[0003]Plasma discharges can be used to excite gases to produce activated gases containing ions, free radicals, atoms and molecules. Activated gases are used for numerous industrial and scientific applications including processing solid materials such as semiconductor wafers, powders, and other gases. The parameters of the plasma and the conditions of the exposure of the plasma to the material being processed vary widely depending on the application.[0004]Plasmas can ...

AI Technical Summary

Benefits of technology

The invention is a toroidal plasma channel with varying cross-section areas along its length to optimize gas flow and gas-plasma interactions. This design also reduces surface erosions and extends the useful lifetime of the plasma chamber. The plasma chamber can be customized for a particular application or use, and the design can improve plasma stability and power efficiency while reducing manufacturing costs and serviceability issues. The invention also includes a kit for constructing a toroidal plasma chamber with an injection member, output member, and removable side members that create a vacuum seal and an electric break for continuous fluid flow. Overall, the invention allows for better control of gas flow and plasma profile, increases dissociation rate of reactive gases, reduces erosion, and improves plasma stability.

Problems solved by technology

However, performance of the plasma device remains limited by the chamber's design.

In existing toroidal plasma channel designs with a nearly uniform cross-section area, these changes in gas or plasma conditions create undesirable or uncontrolled gas flow patterns and plasma profiles.

As a result, the plasma device is not optimized in the entire plasma channel.

The erosion location in the plasma channel is also difficult to predict as it depends on the power, flow, pressure and species.

As a result, toroidal plasma devices have a limited lifetime.

Images