The invention relates to the technical field of plasmas, in particular to a
remote plasma source working point judgment method, device and equipment and a medium. The
mass spectrum
dissociation rate is calculated according to the first
mass spectrum and the second
mass spectrum; calculating a spectral
dissociation rate according to the
spectrogram; performing correction calculation on the
mass spectrum dissociation rate and the spectral dissociation rate based on the initial prior
Gaussian distribution model to obtain a corrected dissociation rate; when the corrected dissociation rate meets the dissociation rate required by the process, calculating an actual
reaction rate according to the
spectrogram and a preset emission peak height threshold value; when the actual
reaction rate is equal to the
reaction rate threshold value, a feedback
signal reaching the process working point is generated;
mass spectrum data and
spectral data are mutually verified in real time, the contradiction between single-mode detection precision and process compatibility is overcome, errors such as
signal attenuation, interference and peak overlapping are reduced, the reliability of dissociation rate detection is remarkably improved, meanwhile, a working point is judged in combination with correction of the dissociation rate and the actual reaction rate, stability control is enhanced, and the process precision and the yield are improved.