High efficiency secondary and back scattered electron detector

a secondary and electron detector technology, applied in the field of charged particle detection devices, can solve the problems of low efficiency of electrons to light signal conversion and light signal collection, introduce a larger electric noise into the image, etc., and achieve the effects of improving light collection efficiency, and improving light collection efficiency
US20130234032A1Active Publication Date: 2013-09-12ASML NETHERLANDS BV
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
ASML NETHERLANDS BV
Publication Date
2013-09-12

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Abstract

An assembly for a charged particle detection unit is described. The assembly comprises a scintillator disc, a partially coated light guide a thin metal tube for allowing the primary charged particle beam to pass through and a photomultiplier tube (PMT). The shape of scintillator disc and light guide are redesigned to improved the light signal transmission thereafter enhance the light collection efficiency. A light guide with a conicoidal surface over an embedded scintillator improved the light collection efficiency of 34% over a conventional design.
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Description

CROSS-REFERENCES TO RELATED APPLICATIONS

[0001] Not ApplicableSTATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT

[0002] Not ApplicableREFERENCE TO A “SEQUENCE LISTING,” A TABLE, OR A COMPUTER PROGRAM LISTING APPENDIX SUBMITTED ON A COMPACT DISK

[0003] Not ApplicableFIELD OF THE INVENTION

[0004] The present invention relates to a charged particle detection device, more specifically, to a detection device that detecting backscattered electrons and secondary electrons emanating from substrate surface after being impinged by a charged particle beam.BACKGROUND OF THE INVENTION

[0005] A charged particle detector is an indispensable part of a charged particle (ion or electron beam) instruments, for example, a scanning electron microscope (SEM). In a SEM, an electron beam emanated from an electron source is focused into a fine probe over a specimen surface and scanned by a deflection unit in a raster fashion; and signal electrons released from the specimen, i...

Claims

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