Frequency tunable micromirror

a micromirror and frequency-tunable technology, applied in the field of optical scanning devices, can solve the problem that the reflection area of the micromirror is the limiting factor for fully utilizing the photon

Inactive Publication Date: 2013-11-14
NANOLITE SYST
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

While conducting macrofield imaging using the confocal probe, the reflecting area of a micromirror is the limiting factor for fully utilizing the photon collected by the objective lens.

Method used

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  • Frequency tunable micromirror
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  • Frequency tunable micromirror

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Embodiment Construction

[0015]Referring now to the drawings and in particular to FIG. 1, there is depicted a diagram of a laser-scanning confocal microscope in which a preferred embodiment of the present invention is applicable. As shown, a laser-scanning confocal microscope 100 includes a diode laser 166, an avalanche photodetector 188, a stationary mirror 172, a movable micromirror 174, a movable frequency tunable micromirror 175 and an objective system 111.

[0016]A linearly-polarized laser beam from diode laser 166 is initially coupled into a single-mode polarization maintaining (PM) fiber 168. Light exiting PM fiber 168 is then collimated by collimators 169 to a 1 mm diameter beam through a zero-order quarter wave-plate 170 whose axis is oriented at 45° to the incident polarization angle in order to convert the illumination to a circular polarization. After reflection off stationary mirror 172, the illumination is incident on micromirror 174 at 22.5° to micromirror 174 normal. Micromirror 174 scans the ...

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Abstract

An optical imaging system having two micromirrors is disclosed. Each of the two micromirrors can be rotated by a first set of combdrive actuators along a first axis and a second set of combdrive actuators along a second axis. Each of the first and second set of combdrive actuators includes multiple stator comb fingers and multiple rotor comb fingers capable of rotating about a torsion bar. One of the micromirrors can be tuned by applying a current to the torsion bar to change the Young's modulus of the torsion bar via thermoelectrical heating of the torsion bar.

Description

PRIORITY CLAIM[0001]The present application claims priority under 35 U.S.C. §119(e)(1) to provisional application No. 61 / 483,305, filed on May 6, 2011, the contents of which are incorporated herein by reference.BACKGROUND OF THE INVENTION[0002]1. Technical Field[0003]The present invention relates to optical scanning devices in general, and in particular to a frequency turnable micromirror to be utilized in an optical scanning device.[0004]2. Description of Related Art[0005]A laser-based scanning fluorescence imaging system typically includes a confocal probe having a micromirror and an objective lens. The field of view (FOV) of the confocal probe is determined by the back aperture size of the objective lens. In addition, the numerical aperture (NA) of the objective lens determines the fluorescence photon collection ability of the confocal probe. While conducting macrofield imaging using the confocal probe, the reflecting area of a micromirror is the limiting factor for fully utilizi...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G02B26/10
CPCG02B26/0841G02B26/101
Inventor ZHANG, XIAOJINGWANG, YOUMINSHEN, TING
Owner NANOLITE SYST
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