Frequency tunable micromirror
a micromirror and frequency-tunable technology, applied in the field of optical scanning devices, can solve the problem that the reflection area of the micromirror is the limiting factor for fully utilizing the photon
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[0015]Referring now to the drawings and in particular to FIG. 1, there is depicted a diagram of a laser-scanning confocal microscope in which a preferred embodiment of the present invention is applicable. As shown, a laser-scanning confocal microscope 100 includes a diode laser 166, an avalanche photodetector 188, a stationary mirror 172, a movable micromirror 174, a movable frequency tunable micromirror 175 and an objective system 111.
[0016]A linearly-polarized laser beam from diode laser 166 is initially coupled into a single-mode polarization maintaining (PM) fiber 168. Light exiting PM fiber 168 is then collimated by collimators 169 to a 1 mm diameter beam through a zero-order quarter wave-plate 170 whose axis is oriented at 45° to the incident polarization angle in order to convert the illumination to a circular polarization. After reflection off stationary mirror 172, the illumination is incident on micromirror 174 at 22.5° to micromirror 174 normal. Micromirror 174 scans the ...
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