OCT System with Bonded MEMS Tunable Mirror VCSEL Swept Source

a technology of swept source and tunable mirror, which is applied in the field of bonded mems tunable mirror vcsel swept source, can solve the problems of snapping and damaging the mems, and achieve the effect of reducing the risk of snapping

Inactive Publication Date: 2014-06-26
AXSUN TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0010]The present invention is similarly directed to a MEMS tunable VCSEL. The difference is that the MEMS mirror is a bonded to the active region. This allows for a separate electrostatic cavity, that is outside the laser's optical resonant cavity. Moreover, the use of this cavity configur

Problems solved by technology

Monolithically forming the MEMS electrostatically actuated dielectric mirror over the active region creates a number of disadvantages, however.
Another problem is that since the optical cavity and the electrostatic cavity overlap at least

Method used

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  • OCT System with Bonded MEMS Tunable Mirror VCSEL Swept Source
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  • OCT System with Bonded MEMS Tunable Mirror VCSEL Swept Source

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Embodiment Construction

[0036]The invention now will be described more fully hereinafter with reference to the accompanying drawings, in which illustrative embodiments of and detailed approaches to implement the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0037]As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items. Further, the terms: includes, comprises, including and / or comprising, when used in this specification, specify the presence of stated features, elements, and / or components, but do not preclude the presence or addition of one or more other features, elements, components, and / or groups thereof. Further, it will be understood that when an element is referr...

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Abstract

A microelectromechanical systems (MEMS)-tunable vertical-cavity surface-emitting laser (VCSEL) in which the MEMS mirror is a bonded to the active region. This allows for a separate electrostatic cavity, that is outside the laser's optical resonant cavity. Moreover, the use of this cavity configuration allows the MEMS mirror to be tuned by pulling the mirror away from the active region. This reduces the risk of snap down. Moreover, since the MEMS mirror is now bonded to the active region, much wider latitude is available in the technologies that are used to fabricate the MEMS mirror. This is preferably deployed as a swept source in an optical coherence tomography (OCT) system.

Description

BACKGROUND OF THE INVENTION[0001]Optical coherence analysis relies on the use of the interference phenomena between a reference wave and an experimental wave or between two parts of an experimental wave to measure distances and thicknesses, and calculate indices of refraction of a sample. Optical Coherence Tomography (OCT) is one example technology that is used to perform high-resolution cross sectional imaging. It is often applied to imaging biological tissue structures, for example, on microscopic scales in real time. Optical waves are reflected from an object or sample and a computer produces images of cross sections or three-dimensional volume renderings of the sample by using information on how the waves are changed upon reflection.[0002]There are a number of different classes of OCT, but Fourier domain OCT currently offers the best performance for many applications. Moreover, of the Fourier domain approaches, swept-source OCT has distinct advantages over techniques such as spe...

Claims

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Application Information

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IPC IPC(8): H01L33/00G01B9/02H01S5/06
CPCH01L33/005H01S5/06G01B9/02091H01S5/02216H01S5/0222H01S5/02415H01S5/041H01S5/18305H01S5/18341H01S5/18358H01S5/18366H01S5/18375H01S5/02224H01S5/02235H01S5/02251H01S5/02253G01B9/02004H01S5/068H01S5/183
Inventor FLANDERS, DALE C.KUZNETSOV, MARK E.ATIA, WALID A.JOHNSON, BARTLEY C.
Owner AXSUN TECH
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