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Substrate having concave-convex pattern, light-emitting diode including the substrate, and method for fabricating the diode

a technology of concave convex pattern and substrate, applied in the field of semiconductor/solid-state device manufacturing, semiconductor/semiconductor devices, electrical apparatus, etc., can solve problems such as crystal defects in the epitaxial semiconductor layer

Inactive Publication Date: 2014-08-21
SEOUL VIOSYS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides an LED with better light extraction and reduced crystal defects and a method of manufacturing it. This is achieved by forming concave-convex patterns through wet etching and stabilizing the facets of these patterns to improve the quality of the epitaxial layer formed on top of them.

Problems solved by technology

However, such concave-convex patterns may cause crystal defects in the epitaxial semiconductor layer.

Method used

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  • Substrate having concave-convex pattern, light-emitting diode including the substrate, and method for fabricating the diode
  • Substrate having concave-convex pattern, light-emitting diode including the substrate, and method for fabricating the diode
  • Substrate having concave-convex pattern, light-emitting diode including the substrate, and method for fabricating the diode

Examples

Experimental program
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Effect test

example 3

[0119]Fabrication Example 3 of LED

[0120]An LED was fabricated using a similar method to that of LED fabrication example 1 except that a substrate according to concave-convex fabrication example 3 was used.

[0121]FIG. 14 and FIG. 15 are scanning electron microscope (SEM) images respectively taken after epitaxial layers were grown on concave-convex patterns in accordance with concave-convex pattern fabrication examples 1 and 2.

[0122]Referring to FIG. 14 and FIG. 15, when a concave-convex pattern was formed by dry etching, crystallographic mismatch such as a fine void VD generated between an inclined plane of the concave-convex pattern and an epitaxial layer 121, and also dislocation D occurred in the epitaxial layer 121 (LED fabrication example 2, FIG. 15). On the other hand, when a concave-convex pattern 10a was formed by wet etching, no fine void VD was observed on the interface between an inclined plane of the concave-convex pattern 10a and an epitaxial layer 21, almost no dislocati...

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Abstract

Provided are a substrate having concave-convex patterns, a light-emitting diode (LED) including the substrate, and a method of fabricating the LED. The LED includes a substrate, and concave-convex patterns disposed in an upper surface of the substrate and having convexes and concaves defined by the convexes. Unit light-emitting device having a first conductive semiconductor layer, an active layer, and a second conductive semiconductor layer disposed on the substrate in sequence is present.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application is the National Stage Entry of International Application PCT / KR2012 / 007912, filed on Sep. 28, 2012, and claims priority from and the benefit of Korean Patent Application No. 10-2011-0100097, filed on Sep. 30, 2011, which are incorporated herein by reference for all purposes as if fully set forth herein.BACKGROUND[0002]1. Field[0003]The present invention relates to a semiconductor device, and more particularly, to a light-emitting diode (LED).[0004]2. Discussion of the Background[0005]An LED is a device having an n-type semiconductor layer, a p-type semiconductor layer, and an active layer disposed between the n-type and p-type semiconductor layers. When a forward electric field is applied to the n-type and p-type semiconductor layers, electrons and holes are injected into the active layer, and the injected electrons and holes are recombined in the active layer to emit light.[0006]The efficiency of such an LED is determine...

Claims

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Application Information

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IPC IPC(8): H01L33/22H01L33/06
CPCH01L33/06H01L33/22H01L27/153H01L33/007H01L33/10H01L33/20H01L33/14H01L33/16H01L33/32
Inventor KIM, JAE KWONLEE, SUM GEUNKIM, KYUNG WANYOON, YEO JINSUH, DUK IIKIM, JI HYE
Owner SEOUL VIOSYS CO LTD
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